WO2002062583A8 - Protection of nozzle structures in an ink jet printhead - Google Patents

Protection of nozzle structures in an ink jet printhead

Info

Publication number
WO2002062583A8
WO2002062583A8 PCT/AU2002/000066 AU0200066W WO02062583A8 WO 2002062583 A8 WO2002062583 A8 WO 2002062583A8 AU 0200066 W AU0200066 W AU 0200066W WO 02062583 A8 WO02062583 A8 WO 02062583A8
Authority
WO
WIPO (PCT)
Prior art keywords
nozzles
guard
nozzle
ink jet
array
Prior art date
Application number
PCT/AU2002/000066
Other languages
French (fr)
Other versions
WO2002062583A1 (en
Inventor
Kia Silverbrook
Original Assignee
Silverbrook Res Pty Ltd
Kia Silverbrook
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Silverbrook Res Pty Ltd, Kia Silverbrook filed Critical Silverbrook Res Pty Ltd
Priority to AU2002224665A priority Critical patent/AU2002224665B2/en
Priority to DE60224009T priority patent/DE60224009D1/en
Priority to JP2002562569A priority patent/JP3960919B2/en
Priority to EP02715314A priority patent/EP1363781B1/en
Priority to KR1020037010258A priority patent/KR100582100B1/en
Priority to IL15723802A priority patent/IL157238A0/en
Priority to US10/470,944 priority patent/US7128845B2/en
Publication of WO2002062583A1 publication Critical patent/WO2002062583A1/en
Priority to IL157238A priority patent/IL157238A/en
Priority to ZA2003/06305A priority patent/ZA200306305B/en
Priority to AU2004203186A priority patent/AU2004203186B2/en
Publication of WO2002062583A8 publication Critical patent/WO2002062583A8/en
Priority to US11/330,060 priority patent/US7441870B2/en
Priority to US12/206,669 priority patent/US7735966B2/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/1433—Structure of nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/145—Arrangement thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1614—Production of print heads with piezoelectric elements of cantilever type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1648—Production of print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/165—Preventing or detecting of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
    • B41J2/16505—Caps, spittoons or covers for cleaning or preventing drying out
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J29/00—Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
    • B41J29/12—Guards, shields or dust excluders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D15/00—Component parts of recorders for measuring arrangements not specially adapted for a specific variable
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
    • B41J2002/14435—Moving nozzle made of thermal bend detached actuator
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
    • B41J2002/14443—Nozzle guard
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Abstract

A printhead for an ink jet printer with an array (14) of ink ejection nozzles (22) formed from MEMS techniques. To protect the delicate nozzle structures, a nozzle guard (80) covers the exterior surface of the array (14). A corresponding array of apertures (84) is formed in the guard (80). To attach the guard (80) to the silicon substrate (16) carrying the nozzles (22), alignment formations (148) configured for engagement with complementary formations on a nozzle guard (86). For precise registration between the nozzles (22) and the respective apertures (86) in the guard (80), the alignment formations (148) may be formed using the same etching and deposition techniques used to form the nozzles (22). To protect the fragile nozzle structures (22) from inadvertent contact with the struts (86) during assembly, the nozzles (22) are reinforced by sacrificial material (152) which subsequently removed by an oxygen plasma etch (154).
PCT/AU2002/000066 2001-02-06 2002-01-22 Protection of nozzle structures in an ink jet printhead WO2002062583A1 (en)

Priority Applications (12)

Application Number Priority Date Filing Date Title
AU2002224665A AU2002224665B2 (en) 2001-02-06 2002-01-22 Protection of nozzle structures in an ink jet printhead
DE60224009T DE60224009D1 (en) 2001-02-06 2002-01-22 PROTECTION FOR NOZZLE CONSTRUCTIONS IN AN INK JET PRINT HEAD
JP2002562569A JP3960919B2 (en) 2001-02-06 2002-01-22 Manufacturing method of print head for ink jet printer
EP02715314A EP1363781B1 (en) 2001-02-06 2002-01-22 Protection of nozzle structures in an ink jet printhead
KR1020037010258A KR100582100B1 (en) 2001-02-06 2002-01-22 Protection of nozzle structures in an ink jet printhead
IL15723802A IL157238A0 (en) 2001-02-06 2002-01-24 Protection of nozzle structures in an ink jet printhead
US10/470,944 US7128845B2 (en) 2001-02-06 2002-01-24 Protection of nozzle structures in an ink jet printhead
IL157238A IL157238A (en) 2001-02-06 2003-08-04 Method of fabricating a printhead for an ink jet printer
ZA2003/06305A ZA200306305B (en) 2001-02-06 2003-08-14 Protection of nozzle structures in an ink jet printhead
AU2004203186A AU2004203186B2 (en) 2001-02-06 2004-07-15 A method of fabricating a printhead with nozzle protection
US11/330,060 US7441870B2 (en) 2001-02-06 2006-01-12 Protection of nozzle structures in a liquid-ejection integrated circuit device
US12/206,669 US7735966B2 (en) 2001-02-06 2008-09-08 Liquid-ejection integrated circuit device having nozzle shield

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AUPR2923 2001-02-06
AUPR2923A AUPR292301A0 (en) 2001-02-06 2001-02-06 A method and apparatus (ART99)

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US10470944 A-371-Of-International 2002-01-24
US11/330,060 Continuation US7441870B2 (en) 2001-02-06 2006-01-12 Protection of nozzle structures in a liquid-ejection integrated circuit device

Publications (2)

Publication Number Publication Date
WO2002062583A1 WO2002062583A1 (en) 2002-08-15
WO2002062583A8 true WO2002062583A8 (en) 2005-10-06

Family

ID=3826949

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/AU2002/000066 WO2002062583A1 (en) 2001-02-06 2002-01-22 Protection of nozzle structures in an ink jet printhead

Country Status (11)

Country Link
US (18) US6733684B2 (en)
EP (1) EP1363781B1 (en)
JP (1) JP3960919B2 (en)
KR (1) KR100582100B1 (en)
CN (1) CN1274504C (en)
AT (1) ATE380666T1 (en)
AU (1) AUPR292301A0 (en)
DE (1) DE60224009D1 (en)
IL (2) IL157238A0 (en)
WO (1) WO2002062583A1 (en)
ZA (1) ZA200306305B (en)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002527272A (en) 1998-10-16 2002-08-27 シルバーブルック リサーチ プロプライエタリイ、リミテッド Improvements on inkjet printers
US6412904B1 (en) * 2000-05-23 2002-07-02 Silverbrook Research Pty Ltd. Residue removal from nozzle guard for ink jet printhead
US6412908B2 (en) * 2000-05-23 2002-07-02 Silverbrook Research Pty Ltd Inkjet collimator
US7237873B2 (en) * 2002-11-23 2007-07-03 Silverbrook Research Pty Ltd Inkjet printhead having low pressure ink ejection zone
AU2004203186B2 (en) * 2001-02-06 2005-07-14 Zamtec Limited A method of fabricating a printhead with nozzle protection
AUPR277701A0 (en) * 2001-01-30 2001-02-22 Silverbrook Research Pty. Ltd. An apparatus (art98)
AUPR292301A0 (en) * 2001-02-06 2001-03-01 Silverbrook Research Pty. Ltd. A method and apparatus (ART99)
US7416126B2 (en) * 2005-06-24 2008-08-26 Symbol Technologies, Inc. Taut, torsional flexure and a compact drive for, and method of, scanning light using the flexure
CN100463801C (en) * 2005-07-27 2009-02-25 国际联合科技股份有限公司 Method for making through-hole and jetting plate of ink-jetting printing head device
JP4509193B2 (en) * 2008-02-13 2010-07-21 ブラザー工業株式会社 Droplet discharge device
JP5123881B2 (en) * 2008-06-05 2013-01-23 エスアイアイ・プリンテック株式会社 Liquid jet head, liquid jet recording apparatus, and liquid filling method for liquid jet head
CN102582307B (en) * 2011-01-10 2014-10-22 研能科技股份有限公司 Fast wide width printing method and printing device suitable for same
KR101867275B1 (en) 2011-11-17 2018-06-18 삼성디스플레이 주식회사 Inket printhead and method of manufacturing the same
JP6223006B2 (en) * 2013-06-12 2017-11-01 キヤノン株式会社 Liquid discharge head chip and manufacturing method thereof
DE102015204514A1 (en) 2015-03-12 2015-05-07 Heidelberger Druckmaschinen Ag Sheet-fed press with concave transport table
US11241833B2 (en) * 2016-03-09 2022-02-08 Universities Space Research Association 3D printed electronics using directional plasma jet
JP6817008B2 (en) * 2016-09-29 2021-01-20 エスアイアイ・プリンテック株式会社 Liquid injection head and liquid injection recorder
EP3692563A4 (en) 2017-10-01 2021-07-07 Space Foundry Inc. Modular print head assembly for plasma jet printing
IT201900007196A1 (en) 2019-05-24 2020-11-24 St Microelectronics Srl MICROFLUID DEVICE FOR CONTINUOUS EXPULSION OF FLUIDS, IN PARTICULAR FOR INK PRINTING, AND RELATED MANUFACTURING PROCEDURE

Family Cites Families (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4450455A (en) * 1981-06-18 1984-05-22 Canon Kabushiki Kaisha Ink jet head
US4450445A (en) * 1981-09-25 1984-05-22 Motorola Inc. Range rate dependent pulse control apparatus and method therefor
JPS58217365A (en) 1982-06-11 1983-12-17 Fujitsu Ltd Nozzle clogging detecting device for head in ink jet printer
DE3523428A1 (en) * 1985-06-29 1987-01-02 Philips Patentverwaltung Ink jet print head
EP0212943B1 (en) * 1985-08-13 1991-02-27 Matsushita Electric Industrial Co., Ltd. Ink jet recording apparatus
EP0306341B1 (en) * 1987-09-03 1993-01-07 Matsushita Electric Industrial Co., Ltd. Ink jet recording apparatus
US4937676A (en) 1989-02-10 1990-06-26 Polariod Corporation Electronic camera system with detachable printer
DE69028038T2 (en) 1989-05-17 1997-01-30 Minolta Camera Kk Recording and repro camera
US5045870A (en) * 1990-04-02 1991-09-03 International Business Machines Corporation Thermal ink drop on demand devices on a single chip with vertical integration of driver device
US5057853A (en) * 1990-09-04 1991-10-15 Xerox Corporation Thermal ink jet printhead with stepped nozzle face and method of fabrication therefor
US6019457A (en) * 1991-01-30 2000-02-01 Canon Information Systems Research Australia Pty Ltd. Ink jet print device and print head or print apparatus using the same
JP3144949B2 (en) * 1992-05-27 2001-03-12 日本碍子株式会社 Piezoelectric / electrostrictive actuator
US5398131A (en) 1992-08-13 1995-03-14 Hall; Dennis R. Stereoscopic hardcopy methods
JP3248964B2 (en) * 1992-12-22 2002-01-21 キヤノン株式会社 Liquid jet recording head and liquid jet recording apparatus having the same
GB9325076D0 (en) 1993-12-07 1994-02-02 The Technology Partnership Plc Electronic camera
JPH08118641A (en) * 1994-10-20 1996-05-14 Canon Inc Ink jet head, ink jet head cartridge, ink jet device and ink container for ink jet head cartridge into which ink is re-injected
CA2137587C (en) * 1994-12-08 1999-03-23 Murray Charles Baker Broadcast/multicast filtering by the bridge-based access point
EP0765226A1 (en) 1995-04-12 1997-04-02 Eastman Kodak Company Color video printer and a photo-cd system with integrated printer
DE19522593C2 (en) * 1995-06-19 1999-06-10 Francotyp Postalia Gmbh Device for keeping the nozzles of an ink print head clean
JP3343875B2 (en) * 1995-06-30 2002-11-11 キヤノン株式会社 Method of manufacturing inkjet head
US5999203A (en) 1995-08-18 1999-12-07 Ttp Group, Plc Printer assembly with easily loaded paper cartridge
EP0763930B1 (en) 1995-09-15 2002-10-16 Agfa-Gevaert Method for calculating color gamuts
EP1640162B1 (en) * 1997-07-15 2007-03-28 Silverbrook Research Pty. Ltd Inkjet nozzle arrangement having paddle forming a portion of a wall
AUPP259398A0 (en) * 1998-03-25 1998-04-23 Silverbrook Research Pty Ltd Image creation method and apparatus (IJ41)
WO2000023279A1 (en) 1998-10-16 2000-04-27 Silverbrook Research Pty. Limited Improvements relating to inkjet printers
DE19901264C2 (en) * 1999-01-15 2003-06-18 Tally Computerdrucker Gmbh Nozzle head for an ink printer
JP3861532B2 (en) * 1999-11-01 2006-12-20 カシオ計算機株式会社 Inkjet printer head manufacturing method
JP5057318B2 (en) * 1999-12-30 2012-10-24 アドビオン インコーポレイテッド Multiple electrospray apparatus, systems, and methods
US6836056B2 (en) 2000-02-04 2004-12-28 Viking Technologies, L.C. Linear motor having piezo actuators
US6341842B1 (en) * 2000-05-03 2002-01-29 Lexmark International, Inc. Surface modified nozzle plate
US6439693B1 (en) * 2000-05-04 2002-08-27 Silverbrook Research Pty Ltd. Thermal bend actuator
US6428133B1 (en) * 2000-05-23 2002-08-06 Silverbrook Research Pty Ltd. Ink jet printhead having a moving nozzle with an externally arranged actuator
US6328417B1 (en) * 2000-05-23 2001-12-11 Silverbrook Research Pty Ltd Ink jet printhead nozzle array
US6412908B2 (en) * 2000-05-23 2002-07-02 Silverbrook Research Pty Ltd Inkjet collimator
US6390591B1 (en) * 2000-05-23 2002-05-21 Silverbrook Research Pty Ltd Nozzle guard for an ink jet printhead
US7237873B2 (en) * 2002-11-23 2007-07-03 Silverbrook Research Pty Ltd Inkjet printhead having low pressure ink ejection zone
US6479821B1 (en) * 2000-09-11 2002-11-12 Ultratech Stepper, Inc. Thermally induced phase switch for laser thermal processing
AUPR277701A0 (en) * 2001-01-30 2001-02-22 Silverbrook Research Pty. Ltd. An apparatus (art98)
AUPR292301A0 (en) * 2001-02-06 2001-03-01 Silverbrook Research Pty. Ltd. A method and apparatus (ART99)
AUPR292401A0 (en) * 2001-02-06 2001-03-01 Silverbrook Research Pty. Ltd. An apparatus and method (ART101)
US7689225B2 (en) * 2002-01-28 2010-03-30 Ntt Docomo, Inc. Method and apparatus for dormant mode support with paging
US20040192222A1 (en) * 2003-03-26 2004-09-30 Nokia Corporation System and method for semi-simultaneously coupling an antenna to transceivers
US7240999B2 (en) * 2003-05-09 2007-07-10 Seiko Epson Corporation Liquid ejection apparatus and control method of the liquid ejection apparatus

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