WO2002063733A2 - Halbleiter-laser mit vertikalem resonator - Google Patents
Halbleiter-laser mit vertikalem resonator Download PDFInfo
- Publication number
- WO2002063733A2 WO2002063733A2 PCT/DE2002/000471 DE0200471W WO02063733A2 WO 2002063733 A2 WO2002063733 A2 WO 2002063733A2 DE 0200471 W DE0200471 W DE 0200471W WO 02063733 A2 WO02063733 A2 WO 02063733A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- semiconductor laser
- current
- laser according
- mode
- selective
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18308—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement
- H01S5/18322—Position of the structure
- H01S5/1833—Position of the structure with more than one structure
- H01S5/18333—Position of the structure with more than one structure only above the active layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S2301/00—Functional characteristics
- H01S2301/18—Semiconductor lasers with special structural design for influencing the near- or far-field
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18308—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18308—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement
- H01S5/18311—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement using selective oxidation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/2054—Methods of obtaining the confinement
- H01S5/2059—Methods of obtaining the confinement by means of particular conductivity zones, e.g. obtained by particle bombardment or diffusion
Definitions
- the invention relates to a semiconductor laser with a vertical resonator formed by reflectors, with an active layer arranged between the reflectors, and emitting photons, and with a current diaphragm for lateral limitation of the current flowing through the active layer.
- Such semiconductor lasers are known as so-called VCSELs (Vertical Cavity Surface-emitting Lasers). These semiconductor lasers have a layer sequence which comprises an active layer enclosed between two DBR mirrors (distributed Bragg reflector). In order to limit the current injected into the active layer in the lateral direction, at least one current diaphragm made of an oxide is provided in one of the DBR mirrors. With their inner edge, the flow diaphragms define a flow aperture and limit the lateral expansion of the pump spot diameter in the active layer.
- the known semiconductor lasers with current diaphragms made of oxide have low optical output powers, high ohmic resistances and high thermal resistances due to the small current aperture.
- the object of the invention is to create a mono-mode semiconductor laser that is easy to manufacture and has a high optical output power and low ohmic and thermal resistance.
- the additional mode-selective area along the axis of the vertical resonator effectively suppresses higher modes, since these suffer higher losses in the mode-selective areas than the basic mode. Therefore, only the basic mode can reach the laser threshold. At the same time, it is possible to increase the current aperture, which in comparison with the prior art results in a higher output power and a lower ohmic and thermal resistance.
- the mode-selective areas are implantation areas with reduced conductivity.
- Such implantation areas can also be formed in a large volume with sufficient precision.
- the conductivity can be reduced by implantations, so that the higher order lateral modes are damped in the implantation areas.
- FIG. 1 shows a cross section through a semiconductor laser according to the invention.
- the semiconductor laser 1 shown in cross section in FIG. 1 has a lower Bragg reflector 3 applied to a substrate, on which a cavity 4 with a photon-emitting active zone is formed. Above the cavity 4 there is an upper Bragg reflector 5 in which current diaphragms 6 are formed. The inner edge of the flow diaphragms 6 defines current apertures 7, by means of which the lateral expansion of the currents injected into the cavity 4 is limited. This creates a photon-emitting pump leak 8 in the cavity 4, through which the radiation reflected between the lower Bragg reflector 3 and the upper Bragg reflector 5 is optically amplified. Part of this radiation is transmitted through the upper Bragg reflector 5 and can exit the semiconductor laser 1 through an outlet opening 9 in an annular front contact 10. In addition, a rear-side contact 11 is present on the rear of the substrate 2.
- the upper Bragg reflector 5 is designed as a mesa 12. In edge areas of the mesa 12 there are implantation areas as mode-selective areas 13, which also extend into the substrate 2. The mode-selective regions 13 have an inner opening 14. The cross-sectional area of the inner opening 14 is always larger than the area of the current apertures 7.
- the conductivity of the material is lower than the conductivity in the inner opening 14 of the mode-selective areas 13. Therefore, higher-order modes that extend into the mode-selective areas 13 are weakened.
- Optical amplification only takes place in the area of the inner opening 14, that is to say in the area of the basic mode.
- the diameter of the current apertures 7 can therefore be chosen to be larger than in the prior art.
- the larger opening of the current apertures 7 compared to the prior art leads to a lower series resistance of the semiconductor laser 1, as well as a lower thermal resistance, which results in weaker aging effects.
- the large current apertures 7 lead to a large pump leak and thus to higher optical output powers.
- the inside diameter of the current apertures 7 in the semiconductor laser 1 is more than 3 ⁇ m, preferably more than 4 ⁇ m.
- the invention described here is not restricted to certain materials.
- the known materials that can be used for the described type of semiconductor lasers 1 come into question.
- the usual methods known to those skilled in the art are suitable for the production.
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002563573A JP2004518304A (ja) | 2001-02-08 | 2002-02-08 | 半導体レーザ |
EP02714002A EP1374356A2 (de) | 2001-02-08 | 2002-02-08 | Halbleiter-laser mit vertikalem resonator |
US10/637,191 US7177339B2 (en) | 2001-02-08 | 2003-08-08 | Semiconductor laser |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10105722.9 | 2001-02-08 | ||
DE10105722A DE10105722B4 (de) | 2001-02-08 | 2001-02-08 | Halbleiter-Laser mit Vertikalresonator und modenselektiven Gebieten |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/637,191 Continuation US7177339B2 (en) | 2001-02-08 | 2003-08-08 | Semiconductor laser |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2002063733A2 true WO2002063733A2 (de) | 2002-08-15 |
WO2002063733A3 WO2002063733A3 (de) | 2003-10-16 |
Family
ID=7673278
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE2002/000471 WO2002063733A2 (de) | 2001-02-08 | 2002-02-08 | Halbleiter-laser mit vertikalem resonator |
Country Status (5)
Country | Link |
---|---|
US (1) | US7177339B2 (de) |
EP (1) | EP1374356A2 (de) |
JP (1) | JP2004518304A (de) |
DE (1) | DE10105722B4 (de) |
WO (1) | WO2002063733A2 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102017108104A1 (de) | 2017-04-13 | 2018-10-18 | Osram Opto Semiconductors Gmbh | Oberflächenemittierender Halbleiterlaser und Verfahren zu dessen Herstellung |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2855661A1 (fr) * | 2003-05-26 | 2004-12-03 | Optogone Sa | Laser a cavite verticale et a emission surfacique, systeme de telecommunication et procede correspondant |
EP1496583B1 (de) * | 2003-07-07 | 2016-05-18 | II-VI Laser Enterprise GmbH | Oberflächenemittierender Laser mit vertikalem Resonator mit verbesserter Kontrolle der transversalen Moden und Herstellungsverfahren desselben |
KR100624433B1 (ko) * | 2004-08-13 | 2006-09-19 | 삼성전자주식회사 | P형 반도체 탄소 나노튜브 및 그 제조 방법 |
KR100982421B1 (ko) * | 2004-10-14 | 2010-09-15 | 삼성전자주식회사 | 깔대기 형태의 전류주입영역을 구비하는 면발광 고출력레이저 소자 |
EP1648060B1 (de) * | 2004-10-14 | 2008-07-23 | Samsung Electronics Co.,Ltd. | Oberflächenemittierender Laser mit externem vertikalem Resonator (VECSEL) und mit stromführender Struktur |
US20070019696A1 (en) * | 2005-07-22 | 2007-01-25 | Li-Hung Lai | Vertical cavity surface emitting laser and method for fabricating the same |
DE102006046297A1 (de) * | 2006-09-29 | 2008-04-03 | Osram Opto Semiconductors Gmbh | Halbleiterlaser |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5493577A (en) * | 1994-12-21 | 1996-02-20 | Sandia Corporation | Efficient semiconductor light-emitting device and method |
US6144682A (en) * | 1998-10-29 | 2000-11-07 | Xerox Corporation | Spatial absorptive and phase shift filter layer to reduce modal reflectivity for higher order modes in a vertical cavity surface emitting laser |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5256596A (en) * | 1992-03-26 | 1993-10-26 | Motorola, Inc. | Top emitting VCSEL with implant |
US5258316A (en) * | 1992-03-26 | 1993-11-02 | Motorola, Inc. | Patterened mirror vertical cavity surface emitting laser |
US5245622A (en) * | 1992-05-07 | 1993-09-14 | Bandgap Technology Corporation | Vertical-cavity surface-emitting lasers with intra-cavity structures |
US5446752A (en) * | 1993-09-21 | 1995-08-29 | Motorola | VCSEL with current blocking layer offset |
GB2295270A (en) * | 1994-11-14 | 1996-05-22 | Sharp Kk | Surface-emitting laser with profiled active region |
US5557627A (en) * | 1995-05-19 | 1996-09-17 | Sandia Corporation | Visible-wavelength semiconductor lasers and arrays |
US5881085A (en) * | 1996-07-25 | 1999-03-09 | Picolight, Incorporated | Lens comprising at least one oxidized layer and method for forming same |
US5719891A (en) * | 1995-12-18 | 1998-02-17 | Picolight Incorporated | Conductive element with lateral oxidation barrier |
US5977604A (en) * | 1996-03-08 | 1999-11-02 | The Regents Of The University Of California | Buried layer in a semiconductor formed by bonding |
US5903590A (en) * | 1996-05-20 | 1999-05-11 | Sandia Corporation | Vertical-cavity surface-emitting laser device |
US5729566A (en) * | 1996-06-07 | 1998-03-17 | Picolight Incorporated | Light emitting device having an electrical contact through a layer containing oxidized material |
US5764674A (en) * | 1996-06-28 | 1998-06-09 | Honeywell Inc. | Current confinement for a vertical cavity surface emitting laser |
US5822356A (en) * | 1997-02-06 | 1998-10-13 | Picolight Incorporated | Intra-cavity lens structures for semiconductor lasers |
US6064683A (en) * | 1997-12-12 | 2000-05-16 | Honeywell Inc. | Bandgap isolated light emitter |
US6542527B1 (en) * | 1998-08-27 | 2003-04-01 | Regents Of The University Of Minnesota | Vertical cavity surface emitting laser |
US6185241B1 (en) * | 1998-10-29 | 2001-02-06 | Xerox Corporation | Metal spatial filter to enhance model reflectivity in a vertical cavity surface emitting laser |
US6751245B1 (en) * | 1999-06-02 | 2004-06-15 | Optical Communication Products, Inc. | Single mode vertical cavity surface emitting laser |
US6882673B1 (en) * | 2001-01-15 | 2005-04-19 | Optical Communication Products, Inc. | Mirror structure for reducing the effect of feedback on a VCSEL |
US6534331B2 (en) * | 2001-07-24 | 2003-03-18 | Luxnet Corporation | Method for making a vertical-cavity surface emitting laser with improved current confinement |
US6680963B2 (en) * | 2001-07-24 | 2004-01-20 | Lux Net Corporation | Vertical-cavity surface emitting laser utilizing a reversed biased diode for improved current confinement |
US6904072B2 (en) * | 2001-12-28 | 2005-06-07 | Finisar Corporation | Vertical cavity surface emitting laser having a gain guide aperture interior to an oxide confinement layer |
US6618414B1 (en) * | 2002-03-25 | 2003-09-09 | Optical Communication Products, Inc. | Hybrid vertical cavity laser with buried interface |
-
2001
- 2001-02-08 DE DE10105722A patent/DE10105722B4/de not_active Expired - Fee Related
-
2002
- 2002-02-08 WO PCT/DE2002/000471 patent/WO2002063733A2/de active Application Filing
- 2002-02-08 EP EP02714002A patent/EP1374356A2/de not_active Withdrawn
- 2002-02-08 JP JP2002563573A patent/JP2004518304A/ja active Pending
-
2003
- 2003-08-08 US US10/637,191 patent/US7177339B2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5493577A (en) * | 1994-12-21 | 1996-02-20 | Sandia Corporation | Efficient semiconductor light-emitting device and method |
US6144682A (en) * | 1998-10-29 | 2000-11-07 | Xerox Corporation | Spatial absorptive and phase shift filter layer to reduce modal reflectivity for higher order modes in a vertical cavity surface emitting laser |
Non-Patent Citations (3)
Title |
---|
MORGAN R A ET AL: "HYBRID DIELECTRIC/ALGAAS MIRROR SPATIALLY FILTERED VERTICAL CAVITY TOP-SURFACE EMITTING LASER" APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, Bd. 66, Nr. 10, 6. März 1995 (1995-03-06), Seiten 1157-1159, XP000503633 ISSN: 0003-6951 * |
NISHIYAMA N ET AL: "MULTI-OXIDE LAYER STRUCTURE FOR SINGLE-MODE OPERATION IN VERTICAL-CAVITY SURFACE-EMITTING LASERS" IEEE PHOTONICS TECHNOLOGY LETTERS, IEEE INC. NEW YORK, US, Bd. 12, Nr. 6, Juni 2000 (2000-06), Seiten 606-609, XP000951817 ISSN: 1041-1135 * |
ZHOU D ET AL: "SIMPLIFIED-ANTIRESONANT REFLECTING OPTICAL WAVEGUIDE-TYPE VERTICAL-CAVITY SURFACE-EMITTING LASERS" APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, Bd. 76, Nr. 13, 27. März 2000 (2000-03-27), Seiten 1659-1661, XP000950542 ISSN: 0003-6951 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102017108104A1 (de) | 2017-04-13 | 2018-10-18 | Osram Opto Semiconductors Gmbh | Oberflächenemittierender Halbleiterlaser und Verfahren zu dessen Herstellung |
Also Published As
Publication number | Publication date |
---|---|
JP2004518304A (ja) | 2004-06-17 |
US20040032892A1 (en) | 2004-02-19 |
WO2002063733A3 (de) | 2003-10-16 |
DE10105722A1 (de) | 2002-09-05 |
US7177339B2 (en) | 2007-02-13 |
EP1374356A2 (de) | 2004-01-02 |
DE10105722B4 (de) | 2006-12-14 |
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