WO2002067321A3 - Enhanced die-down ball grid array and method for making the same - Google Patents

Enhanced die-down ball grid array and method for making the same Download PDF

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Publication number
WO2002067321A3
WO2002067321A3 PCT/US2002/002207 US0202207W WO02067321A3 WO 2002067321 A3 WO2002067321 A3 WO 2002067321A3 US 0202207 W US0202207 W US 0202207W WO 02067321 A3 WO02067321 A3 WO 02067321A3
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WO
WIPO (PCT)
Prior art keywords
grid array
ball grid
making
same
die
Prior art date
Application number
PCT/US2002/002207
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French (fr)
Other versions
WO2002067321A2 (en
Inventor
Reza-Ur Rahman Khan
Sam Ziqun Zhao
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Broadcom Corp
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Publication date
Application filed by Broadcom Corp filed Critical Broadcom Corp
Priority to EP02702083.3A priority Critical patent/EP1374305B1/en
Priority to AU2002235468A priority patent/AU2002235468A1/en
Publication of WO2002067321A2 publication Critical patent/WO2002067321A2/en
Publication of WO2002067321A3 publication Critical patent/WO2002067321A3/en

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    • H01L2924/351Thermal stress

Abstract

An apparatus, system, and method for assembling a ball grid array (BGA) package is described. A stiffener/heat spreader is provided. A substrate has a first surface and a second surface. The substrate has a central window-shaped aperture that extends through the substrate surface to the second substrate surface. The first substrate surface is attached to a surface of the stiffener/heat spreader. A portion of the stiffener/heat spreader is accessible through the central window-shaped aperture. An IC die has a first surface and a second surface. The first IC die surface is mounted to the accessible portion of the stiffener/heat spreader. A drop-in heat spreader has a surface that is mounted to the second IC die surface.
PCT/US2002/002207 2001-02-15 2002-01-25 Enhanced die-down ball grid array and method for making the same WO2002067321A2 (en)

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EP02702083.3A EP1374305B1 (en) 2001-02-15 2002-01-25 Enhanced die-down ball grid array and method for making the same
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US09/783,034 US6853070B2 (en) 2001-02-15 2001-02-15 Die-down ball grid array package with die-attached heat spreader and method for making the same

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Families Citing this family (71)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6882042B2 (en) 2000-12-01 2005-04-19 Broadcom Corporation Thermally and electrically enhanced ball grid array packaging
US7161239B2 (en) * 2000-12-22 2007-01-09 Broadcom Corporation Ball grid array package enhanced with a thermal and electrical connector
US20020079572A1 (en) * 2000-12-22 2002-06-27 Khan Reza-Ur Rahman Enhanced die-up ball grid array and method for making the same
US6906414B2 (en) * 2000-12-22 2005-06-14 Broadcom Corporation Ball grid array package with patterned stiffener layer
US6853070B2 (en) * 2001-02-15 2005-02-08 Broadcom Corporation Die-down ball grid array package with die-attached heat spreader and method for making the same
US7259448B2 (en) * 2001-05-07 2007-08-21 Broadcom Corporation Die-up ball grid array package with a heat spreader and method for making the same
US7145254B2 (en) * 2001-07-26 2006-12-05 Denso Corporation Transfer-molded power device and method for manufacturing transfer-molded power device
TW502406B (en) * 2001-08-01 2002-09-11 Siliconware Precision Industries Co Ltd Ultra-thin package having stacked die
US7126218B1 (en) * 2001-08-07 2006-10-24 Amkor Technology, Inc. Embedded heat spreader ball grid array
US6737750B1 (en) 2001-12-07 2004-05-18 Amkor Technology, Inc. Structures for improving heat dissipation in stacked semiconductor packages
US6879039B2 (en) * 2001-12-18 2005-04-12 Broadcom Corporation Ball grid array package substrates and method of making the same
US6861750B2 (en) * 2002-02-01 2005-03-01 Broadcom Corporation Ball grid array package with multiple interposers
US6825108B2 (en) * 2002-02-01 2004-11-30 Broadcom Corporation Ball grid array package fabrication with IC die support structures
US7550845B2 (en) * 2002-02-01 2009-06-23 Broadcom Corporation Ball grid array package with separated stiffener layer
US6876553B2 (en) * 2002-03-21 2005-04-05 Broadcom Corporation Enhanced die-up ball grid array package with two substrates
US7196415B2 (en) 2002-03-22 2007-03-27 Broadcom Corporation Low voltage drop and high thermal performance ball grid array package
TW535244B (en) * 2002-04-19 2003-06-01 Advanced Semiconductor Eng Wafer level package method and package structure
US6872983B2 (en) * 2002-11-11 2005-03-29 Finisar Corporation High speed optical transceiver package using heterogeneous integration
US7126210B2 (en) * 2003-04-02 2006-10-24 Stmicroelectronics, Inc. System and method for venting pressure from an integrated circuit package sealed with a lid
WO2004107439A1 (en) * 2003-05-28 2004-12-09 Infineon Technologies Ag An integrated circuit package employing a head-spreader member
DE10340438B4 (en) * 2003-09-02 2005-08-04 Epcos Ag Transmitter module with improved heat dissipation
US6984785B1 (en) * 2003-10-27 2006-01-10 Asat Ltd. Thermally enhanced cavity-down integrated circuit package
US7153725B2 (en) * 2004-01-27 2006-12-26 St Assembly Test Services Ltd. Strip-fabricated flip chip in package and flip chip in system heat spreader assemblies and fabrication methods therefor
TWI234860B (en) * 2004-04-02 2005-06-21 Advanced Semiconductor Eng Chip package and process thereof
US7868472B2 (en) * 2004-04-08 2011-01-11 Avago Technologies General Ip (Singapore) Pte. Ltd. Thermal dissipation in integrated circuit systems
US20050236716A1 (en) * 2004-04-22 2005-10-27 Hsuch-Chung Chen Heat dissipation structure and method thereof
US7411281B2 (en) * 2004-06-21 2008-08-12 Broadcom Corporation Integrated circuit device package having both wire bond and flip-chip interconnections and method of making the same
US7482686B2 (en) 2004-06-21 2009-01-27 Braodcom Corporation Multipiece apparatus for thermal and electromagnetic interference (EMI) shielding enhancement in die-up array packages and method of making the same
TWI251910B (en) * 2004-06-29 2006-03-21 Phoenix Prec Technology Corp Semiconductor device buried in a carrier and a method for fabricating the same
US7268019B2 (en) * 2004-09-22 2007-09-11 Halliburton Energy Services, Inc. Method and apparatus for high temperature operation of electronics
US7786591B2 (en) 2004-09-29 2010-08-31 Broadcom Corporation Die down ball grid array package
US7271479B2 (en) * 2004-11-03 2007-09-18 Broadcom Corporation Flip chip package including a non-planar heat spreader and method of making the same
US8125076B2 (en) * 2004-11-12 2012-02-28 Stats Chippac Ltd. Semiconductor package system with substrate heat sink
US7968371B2 (en) * 2005-02-01 2011-06-28 Stats Chippac Ltd. Semiconductor package system with cavity substrate
EP1873826B1 (en) * 2005-04-18 2016-04-20 Murata Manufacturing Co., Ltd. Electronic component module
US7566591B2 (en) * 2005-08-22 2009-07-28 Broadcom Corporation Method and system for secure heat sink attachment on semiconductor devices with macroscopic uneven surface features
US7582951B2 (en) 2005-10-20 2009-09-01 Broadcom Corporation Methods and apparatus for improved thermal performance and electromagnetic interference (EMI) shielding in leadframe integrated circuit (IC) packages
US9713258B2 (en) * 2006-04-27 2017-07-18 International Business Machines Corporation Integrated circuit chip packaging
US7714453B2 (en) * 2006-05-12 2010-05-11 Broadcom Corporation Interconnect structure and formation for package stacking of molded plastic area array package
US9299634B2 (en) * 2006-05-16 2016-03-29 Broadcom Corporation Method and apparatus for cooling semiconductor device hot blocks and large scale integrated circuit (IC) using integrated interposer for IC packages
US8183680B2 (en) 2006-05-16 2012-05-22 Broadcom Corporation No-lead IC packages having integrated heat spreader for electromagnetic interference (EMI) shielding and thermal enhancement
US20070273023A1 (en) * 2006-05-26 2007-11-29 Broadcom Corporation Integrated circuit package having exposed thermally conducting body
US7808087B2 (en) 2006-06-01 2010-10-05 Broadcom Corporation Leadframe IC packages having top and bottom integrated heat spreaders
US8581381B2 (en) 2006-06-20 2013-11-12 Broadcom Corporation Integrated circuit (IC) package stacking and IC packages formed by same
US7532092B2 (en) * 2006-06-20 2009-05-12 Tdk Corporation Grounding strategy for filter on planar substrate
US9013035B2 (en) * 2006-06-20 2015-04-21 Broadcom Corporation Thermal improvement for hotspots on dies in integrated circuit packages
US8049313B2 (en) * 2006-09-20 2011-11-01 Freescale Semiconductor, Inc. Heat spreader for semiconductor package
US7659143B2 (en) * 2006-09-29 2010-02-09 Intel Corporation Dual-chip integrated heat spreader assembly, packages containing same, and systems containing same
US8169067B2 (en) * 2006-10-20 2012-05-01 Broadcom Corporation Low profile ball grid array (BGA) package with exposed die and method of making same
US7948093B2 (en) * 2006-12-28 2011-05-24 Samgsung Electronics Co., Ltd. Memory IC package assembly having stair step metal layer and apertures
US7872335B2 (en) * 2007-06-08 2011-01-18 Broadcom Corporation Lead frame-BGA package with enhanced thermal performance and I/O counts
US8643172B2 (en) * 2007-06-08 2014-02-04 Freescale Semiconductor, Inc. Heat spreader for center gate molding
US7906857B1 (en) 2008-03-13 2011-03-15 Xilinx, Inc. Molded integrated circuit package and method of forming a molded integrated circuit package
US7863732B2 (en) * 2008-03-18 2011-01-04 Stats Chippac Ltd. Ball grid array package system
US8039942B2 (en) * 2008-06-17 2011-10-18 Stats Chippac Ltd. Ball grid array package stacking system
US7871862B2 (en) * 2008-09-08 2011-01-18 Stats Chippac Ltd. Ball grid array package stacking system
JPWO2010038345A1 (en) * 2008-10-03 2012-02-23 パナソニック株式会社 Wiring substrate, semiconductor device, and manufacturing method thereof
US20100314730A1 (en) * 2009-06-16 2010-12-16 Broadcom Corporation Stacked hybrid interposer through silicon via (TSV) package
US8362609B1 (en) 2009-10-27 2013-01-29 Xilinx, Inc. Integrated circuit package and method of forming an integrated circuit package
US8810028B1 (en) 2010-06-30 2014-08-19 Xilinx, Inc. Integrated circuit packaging devices and methods
US8472190B2 (en) * 2010-09-24 2013-06-25 Ati Technologies Ulc Stacked semiconductor chip device with thermal management
US20120126396A1 (en) * 2010-11-19 2012-05-24 Broadcom Corporation Die down device with thermal connector
TWI446495B (en) * 2011-01-19 2014-07-21 Subtron Technology Co Ltd Package carrier and manufacturing method thereof
CN102867814A (en) * 2011-07-06 2013-01-09 鸿富锦精密工业(深圳)有限公司 Chip packaging body
US8718550B2 (en) * 2011-09-28 2014-05-06 Broadcom Corporation Interposer package structure for wireless communication element, thermal enhancement, and EMI shielding
US9006889B2 (en) 2011-11-11 2015-04-14 Skyworks Solutions, Inc. Flip chip packages with improved thermal performance
US20130308274A1 (en) * 2012-05-21 2013-11-21 Triquint Semiconductor, Inc. Thermal spreader having graduated thermal expansion parameters
US10090173B2 (en) 2015-06-05 2018-10-02 International Business Machines Corporation Method of fabricating a chip module with stiffening frame and directional heat spreader
US10061363B2 (en) * 2015-09-04 2018-08-28 Apple Inc. Combination parallel path heatsink and EMI shield
US11322456B2 (en) * 2017-06-30 2022-05-03 Intel Corporation Die back side structures for warpage control
KR20220037069A (en) 2020-09-17 2022-03-24 삼성전자주식회사 Semiconductor package and method for fabricating the same

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5045921A (en) * 1989-12-26 1991-09-03 Motorola, Inc. Pad array carrier IC device using flexible tape
US5578869A (en) * 1994-03-29 1996-11-26 Olin Corporation Components for housing an integrated circuit device
JPH10247703A (en) * 1997-03-05 1998-09-14 Sumitomo Kinzoku Electro Device:Kk Ball grid array package and printed board
US5889324A (en) * 1998-03-30 1999-03-30 Nec Corporation Package for a semiconductor device
US5903052A (en) * 1998-05-12 1999-05-11 Industrial Technology Research Institute Structure for semiconductor package for improving the efficiency of spreading heat
US6184580B1 (en) * 1999-09-10 2001-02-06 Siliconware Precision Industries Co., Ltd. Ball grid array package with conductive leads

Family Cites Families (126)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3790866A (en) 1973-05-14 1974-02-05 Gen Motors Corp Semiconductor device enclosure and method of making same
US4611238A (en) * 1982-05-05 1986-09-09 Burroughs Corporation Integrated circuit package incorporating low-stress omnidirectional heat sink
US5065281A (en) * 1990-02-12 1991-11-12 Rogers Corporation Molded integrated circuit package incorporating heat sink
US5173766A (en) * 1990-06-25 1992-12-22 Lsi Logic Corporation Semiconductor device package and method of making such a package
US5216278A (en) * 1990-12-04 1993-06-01 Motorola, Inc. Semiconductor device having a pad array carrier package
US5208504A (en) * 1990-12-28 1993-05-04 Raytheon Company Saw device and method of manufacture
US5801432A (en) 1992-06-04 1998-09-01 Lsi Logic Corporation Electronic system using multi-layer tab tape semiconductor device having distinct signal, power and ground planes
US5285352A (en) * 1992-07-15 1994-02-08 Motorola, Inc. Pad array semiconductor device with thermal conductor and process for making the same
US5583377A (en) 1992-07-15 1996-12-10 Motorola, Inc. Pad array semiconductor device having a heat sink with die receiving cavity
US5438216A (en) 1992-08-31 1995-08-01 Motorola, Inc. Light erasable multichip module
US5386344A (en) * 1993-01-26 1995-01-31 International Business Machines Corporation Flex circuit card elastomeric cable connector assembly
US5291062A (en) 1993-03-01 1994-03-01 Motorola, Inc. Area array semiconductor device having a lid with functional contacts
US5340771A (en) 1993-03-18 1994-08-23 Lsi Logic Corporation Techniques for providing high I/O count connections to semiconductor dies
US5485037A (en) * 1993-04-12 1996-01-16 Amkor Electronics, Inc. Semiconductor device having a thermal dissipator and electromagnetic shielding
US5294826A (en) * 1993-04-16 1994-03-15 Northern Telecom Limited Integrated circuit package and assembly thereof for thermal and EMI management
US5397917A (en) 1993-04-26 1995-03-14 Motorola, Inc. Semiconductor package capable of spreading heat
US5394009A (en) * 1993-07-30 1995-02-28 Sun Microsystems, Inc. Tab semiconductor package with cushioned land grid array outer lead bumps
US5650662A (en) * 1993-08-17 1997-07-22 Edwards; Steven F. Direct bonded heat spreader
US5397921A (en) 1993-09-03 1995-03-14 Advanced Semiconductor Assembly Technology Tab grid array
US5490324A (en) 1993-09-15 1996-02-13 Lsi Logic Corporation Method of making integrated circuit package having multiple bonding tiers
US5366589A (en) * 1993-11-16 1994-11-22 Motorola, Inc. Bonding pad with circular exposed area and method thereof
US5642261A (en) 1993-12-20 1997-06-24 Sgs-Thomson Microelectronics, Inc. Ball-grid-array integrated circuit package with solder-connected thermal conductor
KR970005712B1 (en) * 1994-01-11 1997-04-19 삼성전자 주식회사 High heat sink package
US6347037B2 (en) 1994-04-28 2002-02-12 Fujitsu Limited Semiconductor device and method of forming the same
DE69527473T2 (en) 1994-05-09 2003-03-20 Nec Corp Semiconductor arrangement consisting of a semiconductor chip, which is connected by means of contact bumps on the printed circuit board, and assembly method
US5583378A (en) 1994-05-16 1996-12-10 Amkor Electronics, Inc. Ball grid array integrated circuit package with thermal conductor
US5717252A (en) * 1994-07-25 1998-02-10 Mitsui High-Tec, Inc. Solder-ball connected semiconductor device with a recessed chip mounting area
JPH0846085A (en) * 1994-08-02 1996-02-16 Fujitsu Ltd Semiconductor device and method of manufacture
US5648679A (en) 1994-09-16 1997-07-15 National Semiconductor Corporation Tape ball lead integrated circuit package
US5541450A (en) * 1994-11-02 1996-07-30 Motorola, Inc. Low-profile ball-grid array semiconductor package
US5798909A (en) 1995-02-15 1998-08-25 International Business Machines Corporation Single-tiered organic chip carriers for wire bond-type chips
US5707287A (en) * 1995-04-11 1998-01-13 Mccrea, Jr.; Charles H. Jackpot system for live card games based upon game play wagering and method therefore
US5572405A (en) 1995-06-07 1996-11-05 International Business Machines Corporation (Ibm) Thermally enhanced ball grid array package
US5844168A (en) 1995-08-01 1998-12-01 Minnesota Mining And Manufacturing Company Multi-layer interconnect sutructure for ball grid arrays
US5650659A (en) * 1995-08-04 1997-07-22 National Semiconductor Corporation Semiconductor component package assembly including an integral RF/EMI shield
US5691567A (en) 1995-09-19 1997-11-25 National Semiconductor Corporation Structure for attaching a lead frame to a heat spreader/heat slug structure
US5843808A (en) 1996-01-11 1998-12-01 Asat, Limited Structure and method for automated assembly of a tab grid array package
US5796170A (en) 1996-02-15 1998-08-18 Northern Telecom Limited Ball grid array (BGA) integrated circuit packages
KR100192760B1 (en) 1996-02-29 1999-06-15 황인길 Method for manufacturing bga package using metal carrier frame
MY123146A (en) 1996-03-28 2006-05-31 Intel Corp Perimeter matrix ball grid array circuit package with a populated center
US5986340A (en) * 1996-05-02 1999-11-16 National Semiconductor Corporation Ball grid array package with enhanced thermal and electrical characteristics and electronic device incorporating same
US5907903A (en) * 1996-05-24 1999-06-01 International Business Machines Corporation Multi-layer-multi-chip pyramid and circuit board structure and method of forming same
JP2755252B2 (en) 1996-05-30 1998-05-20 日本電気株式会社 Semiconductor device package and semiconductor device
US5726079A (en) 1996-06-19 1998-03-10 International Business Machines Corporation Thermally enhanced flip chip package and method of forming
US5805430A (en) 1996-07-22 1998-09-08 International Business Machines Corporation Zero force heat sink
US6011694A (en) * 1996-08-01 2000-01-04 Fuji Machinery Mfg. & Electronics Co., Ltd. Ball grid array semiconductor package with solder ball openings in an insulative base
JP2828053B2 (en) 1996-08-15 1998-11-25 日本電気株式会社 Semiconductor device
WO1998013876A1 (en) * 1996-09-26 1998-04-02 Samsung Electronics Co., Ltd. Hybrid microwave-frequency integrated circuit
US5856911A (en) * 1996-11-12 1999-01-05 National Semiconductor Corporation Attachment assembly for integrated circuits
US5866949A (en) * 1996-12-02 1999-02-02 Minnesota Mining And Manufacturing Company Chip scale ball grid array for integrated circuit packaging
US5736785A (en) 1996-12-20 1998-04-07 Industrial Technology Research Institute Semiconductor package for improving the capability of spreading heat
JP3032964B2 (en) 1996-12-30 2000-04-17 アナムインダストリアル株式会社 Ball grid array semiconductor package and manufacturing method
US5986885A (en) 1997-04-08 1999-11-16 Integrated Device Technology, Inc. Semiconductor package with internal heatsink and assembly method
US6084777A (en) 1997-04-23 2000-07-04 Texas Instruments Incorporated Ball grid array package
US6617193B1 (en) * 1997-04-30 2003-09-09 Hitachi Chemical Company, Ltd. Semiconductor device, semiconductor device substrate, and methods of fabricating the same
US6011304A (en) 1997-05-05 2000-01-04 Lsi Logic Corporation Stiffener ring attachment with holes and removable snap-in heat sink or heat spreader/lid
US6020637A (en) 1997-05-07 2000-02-01 Signetics Kp Co., Ltd. Ball grid array semiconductor package
US6160705A (en) 1997-05-09 2000-12-12 Texas Instruments Incorporated Ball grid array package and method using enhanced power and ground distribution circuitry
US5907189A (en) * 1997-05-29 1999-05-25 Lsi Logic Corporation Conformal diamond coating for thermal improvement of electronic packages
US5889321A (en) * 1997-06-17 1999-03-30 International Business Machines Corporation Stiffeners with improved adhesion to flexible substrates
US6159764A (en) * 1997-07-02 2000-12-12 Micron Technology, Inc. Varied-thickness heat sink for integrated circuit (IC) packages and method of fabricating IC packages
US5895967A (en) * 1997-07-07 1999-04-20 Texas Instruments Incorporated Ball grid array package having a deformable metal layer and method
JPH1131751A (en) 1997-07-10 1999-02-02 Sony Corp Hollow package and manufacture thereof
US5972734A (en) 1997-09-17 1999-10-26 Lsi Logic Corporation Interposer for ball grid array (BGA) package
US5835355A (en) 1997-09-22 1998-11-10 Lsi Logic Corporation Tape ball grid array package with perforated metal stiffener
US6166434A (en) 1997-09-23 2000-12-26 Lsi Logic Corporation Die clip assembly for semiconductor package
US5949137A (en) * 1997-09-26 1999-09-07 Lsi Logic Corporation Stiffener ring and heat spreader for use with flip chip packaging assemblies
US5901041A (en) 1997-12-02 1999-05-04 Northern Telecom Limited Flexible integrated circuit package
JP3087709B2 (en) 1997-12-08 2000-09-11 日本電気株式会社 Semiconductor device and manufacturing method thereof
US6114761A (en) 1998-01-20 2000-09-05 Lsi Logic Corporation Thermally-enhanced flip chip IC package with extruded heatspreader
US6034427A (en) * 1998-01-28 2000-03-07 Prolinx Labs Corporation Ball grid array structure and method for packaging an integrated circuit chip
US6552264B2 (en) * 1998-03-11 2003-04-22 International Business Machines Corporation High performance chip packaging and method
JP3753218B2 (en) * 1998-03-23 2006-03-08 セイコーエプソン株式会社 Semiconductor device and manufacturing method thereof, circuit board, and electronic apparatus
TW430959B (en) * 1998-04-22 2001-04-21 World Wiser Electronics Inc Thermal enhanced structure of printed circuit board
US6140707A (en) 1998-05-07 2000-10-31 3M Innovative Properties Co. Laminated integrated circuit package
US6002169A (en) 1998-06-15 1999-12-14 Lsi Logic Corporation Thermally enhanced tape ball grid array package
US6060777A (en) * 1998-07-21 2000-05-09 Intel Corporation Underside heat slug for ball grid array packages
US5977626A (en) 1998-08-12 1999-11-02 Industrial Technology Research Institute Thermally and electrically enhanced PBGA package
US6117797A (en) 1998-09-03 2000-09-12 Micron Technology, Inc. Attachment method for heat sinks and devices involving removal of misplaced encapsulant
US6084297A (en) * 1998-09-03 2000-07-04 Micron Technology, Inc. Cavity ball grid array apparatus
US6077724A (en) 1998-09-05 2000-06-20 First International Computer Inc. Multi-chips semiconductor package and fabrication method
TW418511B (en) * 1998-10-12 2001-01-11 Siliconware Precision Industries Co Ltd Packaged device of exposed heat sink
CA2344663A1 (en) * 1998-10-14 2000-04-20 3M Innovative Properties Company Tape ball grid array with interconnected ground plane
JP2000133672A (en) 1998-10-28 2000-05-12 Seiko Epson Corp Semiconductor device, its manufacture, circuit board, and electronic apparatus
JP2000138262A (en) * 1998-10-31 2000-05-16 Anam Semiconductor Inc Chip-scale semiconductor package and manufacture thereof
US6313521B1 (en) * 1998-11-04 2001-11-06 Nec Corporation Semiconductor device and method of manufacturing the same
JP2000150730A (en) * 1998-11-17 2000-05-30 Fujitsu Ltd Semiconductor device and its manufacture
US6069407A (en) 1998-11-18 2000-05-30 Vlsi Technology, Inc. BGA package using PCB and tape in a die-up configuration
US5999415A (en) 1998-11-18 1999-12-07 Vlsi Technology, Inc. BGA package using PCB and tape in a die-down configuration
US5982621A (en) 1998-11-23 1999-11-09 Caesar Technology Inc. Electronic device cooling arrangement
US6057601A (en) 1998-11-27 2000-05-02 Express Packaging Systems, Inc. Heat spreader with a placement recess and bottom saw-teeth for connection to ground planes on a thin two-sided single-core BGA substrate
US6162659A (en) 1999-03-05 2000-12-19 International Business Machines Corporation Method for manufacturing a package structure having a heat spreader for integrated circuit chips
US6133064A (en) 1999-05-27 2000-10-17 Lsi Logic Corporation Flip chip ball grid array package with laminated substrate
US6242279B1 (en) 1999-06-14 2001-06-05 Thin Film Module, Inc. High density wire bond BGA
US6122171A (en) * 1999-07-30 2000-09-19 Micron Technology, Inc. Heat sink chip package and method of making
SG87046A1 (en) * 1999-08-17 2002-03-19 Micron Technology Inc Multi-chip module with stacked dice
US6380623B1 (en) 1999-10-15 2002-04-30 Hughes Electronics Corporation Microcircuit assembly having dual-path grounding and negative self-bias
US6362525B1 (en) 1999-11-09 2002-03-26 Cypress Semiconductor Corp. Circuit structure including a passive element formed within a grid array substrate and method for making the same
US6163458A (en) 1999-12-03 2000-12-19 Caesar Technology, Inc. Heat spreader for ball grid array package
TW452956B (en) * 2000-01-04 2001-09-01 Siliconware Precision Industries Co Ltd Heat dissipation structure of BGA semiconductor package
US6559525B2 (en) * 2000-01-13 2003-05-06 Siliconware Precision Industries Co., Ltd. Semiconductor package having heat sink at the outer surface
US6246111B1 (en) * 2000-01-25 2001-06-12 Siliconware Precision Industries Co., Ltd. Universal lead frame type of quad flat non-lead package of semiconductor
US6541832B2 (en) * 2000-01-31 2003-04-01 Texas Instruments Incorporated Plastic package for micromechanical devices
TW462121B (en) * 2000-09-19 2001-11-01 Siliconware Precision Industries Co Ltd Heat sink type ball grid array package
US6278613B1 (en) * 2000-09-27 2001-08-21 St Assembly Test Services Pte Ltd Copper pads for heat spreader attach
TW457663B (en) 2000-11-08 2001-10-01 Advanced Semiconductor Eng Substrate structure of heat spreader and its package
US6882042B2 (en) * 2000-12-01 2005-04-19 Broadcom Corporation Thermally and electrically enhanced ball grid array packaging
US7161239B2 (en) * 2000-12-22 2007-01-09 Broadcom Corporation Ball grid array package enhanced with a thermal and electrical connector
US20020079572A1 (en) * 2000-12-22 2002-06-27 Khan Reza-Ur Rahman Enhanced die-up ball grid array and method for making the same
US7132744B2 (en) * 2000-12-22 2006-11-07 Broadcom Corporation Enhanced die-up ball grid array packages and method for making the same
TW473962B (en) 2001-01-20 2002-01-21 Siliconware Precision Industries Co Ltd Cavity down ball grid array package and its manufacturing process
US20020096767A1 (en) 2001-01-25 2002-07-25 Cote Kevin J. Cavity down ball grid array package with EMI shielding and reduced thermal resistance
US6853070B2 (en) * 2001-02-15 2005-02-08 Broadcom Corporation Die-down ball grid array package with die-attached heat spreader and method for making the same
US6528869B1 (en) * 2001-04-06 2003-03-04 Amkor Technology, Inc. Semiconductor package with molded substrate and recessed input/output terminals
US6472741B1 (en) * 2001-07-14 2002-10-29 Siliconware Precision Industries Co., Ltd. Thermally-enhanced stacked-die ball grid array semiconductor package and method of fabricating the same
US6528892B2 (en) * 2001-06-05 2003-03-04 International Business Machines Corporation Land grid array stiffener use with flexible chip carriers
US6879039B2 (en) * 2001-12-18 2005-04-12 Broadcom Corporation Ball grid array package substrates and method of making the same
US7156161B2 (en) * 2002-01-24 2007-01-02 The United States Of America As Represented By The Secretary Of The Navy Lightweight thermal heat transfer apparatus
US6552430B1 (en) * 2002-01-30 2003-04-22 Texas Instruments Incorporated Ball grid array substrate with improved traces formed from copper based metal
US6861750B2 (en) * 2002-02-01 2005-03-01 Broadcom Corporation Ball grid array package with multiple interposers
US6825108B2 (en) * 2002-02-01 2004-11-30 Broadcom Corporation Ball grid array package fabrication with IC die support structures
US7550845B2 (en) * 2002-02-01 2009-06-23 Broadcom Corporation Ball grid array package with separated stiffener layer
US7245500B2 (en) * 2002-02-01 2007-07-17 Broadcom Corporation Ball grid array package with stepped stiffener layer
US6858932B2 (en) * 2002-02-07 2005-02-22 Freescale Semiconductor, Inc. Packaged semiconductor device and method of formation
US6876553B2 (en) * 2002-03-21 2005-04-05 Broadcom Corporation Enhanced die-up ball grid array package with two substrates
US7196415B2 (en) * 2002-03-22 2007-03-27 Broadcom Corporation Low voltage drop and high thermal performance ball grid array package

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5045921A (en) * 1989-12-26 1991-09-03 Motorola, Inc. Pad array carrier IC device using flexible tape
US5578869A (en) * 1994-03-29 1996-11-26 Olin Corporation Components for housing an integrated circuit device
JPH10247703A (en) * 1997-03-05 1998-09-14 Sumitomo Kinzoku Electro Device:Kk Ball grid array package and printed board
US5889324A (en) * 1998-03-30 1999-03-30 Nec Corporation Package for a semiconductor device
US5903052A (en) * 1998-05-12 1999-05-11 Industrial Technology Research Institute Structure for semiconductor package for improving the efficiency of spreading heat
US6184580B1 (en) * 1999-09-10 2001-02-06 Siliconware Precision Industries Co., Ltd. Ball grid array package with conductive leads

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 14 31 December 1998 (1998-12-31) *

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US7402906B2 (en) 2008-07-22
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AU2002235468A1 (en) 2002-09-04
EP1374305B1 (en) 2013-04-10
US6853070B2 (en) 2005-02-08
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US20050012203A1 (en) 2005-01-20
US20020109226A1 (en) 2002-08-15

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