WO2003038880A1 - Procede de formation de chemin de decoupe sur une tranche de semi-conducteur, et dispositif pour former un chemin de decoupe - Google Patents
Procede de formation de chemin de decoupe sur une tranche de semi-conducteur, et dispositif pour former un chemin de decoupe Download PDFInfo
- Publication number
- WO2003038880A1 WO2003038880A1 PCT/JP2002/011177 JP0211177W WO03038880A1 WO 2003038880 A1 WO2003038880 A1 WO 2003038880A1 JP 0211177 W JP0211177 W JP 0211177W WO 03038880 A1 WO03038880 A1 WO 03038880A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- semiconductor wafer
- scribe line
- silicon wafer
- semiconductor
- wafer
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/22—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
- B28D1/221—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising by thermic methods
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0064—Devices for the automatic drive or the program control of the machines
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54453—Marks applied to semiconductor devices or parts for use prior to dicing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mining & Mineral Resources (AREA)
- Dicing (AREA)
- Laser Beam Processing (AREA)
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003541038A JPWO2003038880A1 (ja) | 2001-10-31 | 2002-10-28 | 半導体ウエハのスクライブ線の形成方法およびスクライブ線の形成装置 |
US10/483,353 US7015118B2 (en) | 2001-10-31 | 2002-10-28 | Method for forming a scribe line on a semiconductor device and an apparatus for forming the scribe line |
KR10-2003-7016495A KR100509651B1 (ko) | 2001-10-31 | 2002-10-28 | 반도체 웨이퍼의 스크라이브 라인의 형성방법 및스크라이브 라인의 형성장치 |
EP02770283A EP1441385A4 (en) | 2001-10-31 | 2002-10-28 | METHOD FOR FORMING A CROP LINE ON A SEMICONDUCTOR WAFER AND A CROWDING DEVICE |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001-335149 | 2001-10-31 | ||
JP2001335149 | 2001-10-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2003038880A1 true WO2003038880A1 (fr) | 2003-05-08 |
Family
ID=19150171
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2002/011177 WO2003038880A1 (fr) | 2001-10-31 | 2002-10-28 | Procede de formation de chemin de decoupe sur une tranche de semi-conducteur, et dispositif pour former un chemin de decoupe |
Country Status (7)
Country | Link |
---|---|
US (1) | US7015118B2 (ja) |
EP (1) | EP1441385A4 (ja) |
JP (1) | JPWO2003038880A1 (ja) |
KR (1) | KR100509651B1 (ja) |
CN (1) | CN1311528C (ja) |
TW (1) | TWI254984B (ja) |
WO (1) | WO2003038880A1 (ja) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI226877B (en) * | 2001-07-12 | 2005-01-21 | Mitsuboshi Diamond Ind Co Ltd | Method of manufacturing adhered brittle material substrates and method of separating adhered brittle material substrates |
US6700096B2 (en) * | 2001-10-30 | 2004-03-02 | Semiconductor Energy Laboratory Co., Ltd. | Laser apparatus, laser irradiation method, manufacturing method for semiconductor device, semiconductor device, production system for semiconductor device using the laser apparatus, and electronic equipment |
US7105048B2 (en) * | 2001-11-30 | 2006-09-12 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation apparatus |
CN101296787B (zh) * | 2005-10-28 | 2012-02-15 | 三星钻石工业股份有限公司 | 脆性材料基板的划线形成方法及划线形成装置 |
DE102007004953A1 (de) * | 2007-01-26 | 2008-07-31 | Tesa Ag | Heizelement |
CN101690428B (zh) * | 2007-04-25 | 2012-09-05 | 陶瓷技术股份公司 | 陶瓷衬底及其制作方法 |
JP5139852B2 (ja) * | 2008-03-17 | 2013-02-06 | 三星ダイヤモンド工業株式会社 | スクライブ装置及びスクライブ方法 |
JP5309728B2 (ja) * | 2008-06-27 | 2013-10-09 | 富士通セミコンダクター株式会社 | レチクルデータ作成方法及びレチクルデータ作成装置 |
KR101041137B1 (ko) * | 2009-03-25 | 2011-06-13 | 삼성모바일디스플레이주식회사 | 기판 절단 장치 및 이를 이용한 기판 절단 방법 |
KR20100107253A (ko) * | 2009-03-25 | 2010-10-05 | 삼성모바일디스플레이주식회사 | 기판 절단 장치 및 이를 이용한 기판 절단 방법 |
US8706288B2 (en) * | 2009-05-21 | 2014-04-22 | Electro Scientific Industries, Inc. | Apparatus and method for non-contact sensing of transparent articles |
ES2450520T5 (es) * | 2010-03-05 | 2017-08-07 | Sage Electrochromics, Inc. | Laminado de un dispositivo electrocrómico a sustratos de vidrio |
FR2962682B1 (fr) | 2010-07-16 | 2015-02-27 | Saint Gobain | Vitrage electrochimique a proprietes optiques et/ou energetiques electrocommandables |
JP5860217B2 (ja) * | 2011-03-04 | 2016-02-16 | 株式会社ディスコ | レーザー加工装置 |
JP5860219B2 (ja) * | 2011-03-10 | 2016-02-16 | 株式会社ディスコ | レーザー加工装置 |
JP6185812B2 (ja) * | 2013-09-30 | 2017-08-23 | 三星ダイヤモンド工業株式会社 | 脆性材料基板のブレイク方法並びにブレイク装置 |
CN104014937B (zh) * | 2014-05-27 | 2015-11-25 | 瑞安市视尚光学眼镜科技有限公司 | Tac膜分切机的分切装置 |
CN106626097B (zh) * | 2016-12-13 | 2018-07-27 | 莱特巴斯光学仪器(镇江)有限公司 | 一种非对称透镜的生产工艺 |
CN108274648A (zh) * | 2018-02-26 | 2018-07-13 | 江阴市伟欣塑胶有限公司 | 太阳能金刚线切割用中空塑料板 |
JP6736651B2 (ja) | 2018-12-27 | 2020-08-05 | 浜松ホトニクス株式会社 | 冷却ユニット、対物レンズモジュール、半導体検査装置、半導体検査方法 |
CN110948713A (zh) * | 2019-11-25 | 2020-04-03 | 东北大学 | 一种适用于金刚石线切割机的岩石标准试样辅助夹具 |
CN113067246B (zh) * | 2021-03-22 | 2022-03-29 | 度亘激光技术(苏州)有限公司 | 半导体器件腔面及其制备方法和半导体器件 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001130921A (ja) | 1999-10-29 | 2001-05-15 | Mitsuboshi Diamond Industrial Co Ltd | 脆性基板の加工方法及び装置 |
WO2002022301A1 (fr) * | 2000-09-13 | 2002-03-21 | Hamamatsu Photonics K.K. | Procede et dispositif d'usinage par rayonnement laser |
JP2002362933A (ja) * | 2001-06-11 | 2002-12-18 | Seiko Epson Corp | 被加工物の割断方法及び割断装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5157001A (en) * | 1989-09-18 | 1992-10-20 | Matsushita Electric Industrial Co., Ltd. | Method of dicing semiconductor wafer along protective film formed on scribe lines |
KR930001371A (ko) * | 1991-06-27 | 1993-01-16 | 김광호 | 반도체 제조용 기판 및 그 형성방법 |
US5686171A (en) * | 1993-12-30 | 1997-11-11 | Vlsi Technology, Inc. | Integrated circuit scribe line structures and methods for making same |
US6075280A (en) * | 1997-12-31 | 2000-06-13 | Winbond Electronics Corporation | Precision breaking of semiconductor wafer into chips by applying an etch process |
JP3455102B2 (ja) * | 1998-02-06 | 2003-10-14 | 三菱電機株式会社 | 半導体ウエハチップ分離方法 |
US6465329B1 (en) * | 1999-01-20 | 2002-10-15 | Amkor Technology, Inc. | Microcircuit die-sawing protector and method |
US6420245B1 (en) * | 1999-06-08 | 2002-07-16 | Kulicke & Soffa Investments, Inc. | Method for singulating semiconductor wafers |
JP3722731B2 (ja) | 2000-09-13 | 2005-11-30 | 浜松ホトニクス株式会社 | レーザ加工方法 |
-
2002
- 2002-10-28 KR KR10-2003-7016495A patent/KR100509651B1/ko not_active IP Right Cessation
- 2002-10-28 EP EP02770283A patent/EP1441385A4/en not_active Withdrawn
- 2002-10-28 CN CNB028217993A patent/CN1311528C/zh not_active Expired - Fee Related
- 2002-10-28 WO PCT/JP2002/011177 patent/WO2003038880A1/ja active Application Filing
- 2002-10-28 JP JP2003541038A patent/JPWO2003038880A1/ja active Pending
- 2002-10-28 US US10/483,353 patent/US7015118B2/en not_active Expired - Fee Related
- 2002-10-30 TW TW091132145A patent/TWI254984B/zh active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001130921A (ja) | 1999-10-29 | 2001-05-15 | Mitsuboshi Diamond Industrial Co Ltd | 脆性基板の加工方法及び装置 |
WO2002022301A1 (fr) * | 2000-09-13 | 2002-03-21 | Hamamatsu Photonics K.K. | Procede et dispositif d'usinage par rayonnement laser |
JP2002362933A (ja) * | 2001-06-11 | 2002-12-18 | Seiko Epson Corp | 被加工物の割断方法及び割断装置 |
Non-Patent Citations (1)
Title |
---|
See also references of EP1441385A4 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2003038880A1 (ja) | 2005-02-24 |
TW200300572A (en) | 2003-06-01 |
US7015118B2 (en) | 2006-03-21 |
CN1311528C (zh) | 2007-04-18 |
US20040214408A1 (en) | 2004-10-28 |
KR100509651B1 (ko) | 2005-08-23 |
CN1579013A (zh) | 2005-02-09 |
EP1441385A4 (en) | 2009-11-18 |
EP1441385A1 (en) | 2004-07-28 |
TWI254984B (en) | 2006-05-11 |
KR20040038916A (ko) | 2004-05-08 |
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