WO2003093165A3 - Thermal micro-actuator based on selective electrical excitation - Google Patents

Thermal micro-actuator based on selective electrical excitation Download PDF

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Publication number
WO2003093165A3
WO2003093165A3 PCT/US2003/011876 US0311876W WO03093165A3 WO 2003093165 A3 WO2003093165 A3 WO 2003093165A3 US 0311876 W US0311876 W US 0311876W WO 03093165 A3 WO03093165 A3 WO 03093165A3
Authority
WO
WIPO (PCT)
Prior art keywords
actuator based
electrical excitation
selective electrical
arm
thermal micro
Prior art date
Application number
PCT/US2003/011876
Other languages
French (fr)
Other versions
WO2003093165A2 (en
Inventor
Susan C Bromley
Bradley J Nelson
Karl Vollmers
Arunkumar Subramanian
Eniko T Enikov
Kamal Deep Mothilal
Original Assignee
Adc Telecommunications Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Adc Telecommunications Inc filed Critical Adc Telecommunications Inc
Priority to AU2003228562A priority Critical patent/AU2003228562A1/en
Publication of WO2003093165A2 publication Critical patent/WO2003093165A2/en
Publication of WO2003093165A3 publication Critical patent/WO2003093165A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H61/04—Electrothermal relays wherein the thermally-sensitive member is only heated directly
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0024—Transducers for transforming thermal into mechanical energy or vice versa, e.g. thermal or bimorph actuators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01B—MACHINES OR ENGINES, IN GENERAL OR OF POSITIVE-DISPLACEMENT TYPE, e.g. STEAM ENGINES
    • F01B29/00—Machines or engines with pertinent characteristics other than those provided for in preceding main groups
    • F01B29/08—Reciprocating-piston machines or engines not otherwise provided for
    • F01B29/10—Engines
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02G—HOT GAS OR COMBUSTION-PRODUCT POSITIVE-DISPLACEMENT ENGINE PLANTS; USE OF WASTE HEAT OF COMBUSTION ENGINES; NOT OTHERWISE PROVIDED FOR
    • F02G1/00—Hot gas positive-displacement engine plants
    • F02G1/04—Hot gas positive-displacement engine plants of closed-cycle type
    • F02G1/043—Hot gas positive-displacement engine plants of closed-cycle type the engine being operated by expansion and contraction of a mass of working gas which is heated and cooled in one of a plurality of constantly communicating expansible chambers, e.g. Stirling cycle type engines
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03G—SPRING, WEIGHT, INERTIA OR LIKE MOTORS; MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOT OTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISE PROVIDED FOR
    • F03G7/00—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for
    • F03G7/06—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N10/00—Electric motors using thermal effects
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/031—Thermal actuators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02G—HOT GAS OR COMBUSTION-PRODUCT POSITIVE-DISPLACEMENT ENGINE PLANTS; USE OF WASTE HEAT OF COMBUSTION ENGINES; NOT OTHERWISE PROVIDED FOR
    • F02G2250/00—Special cycles or special engines
    • F02G2250/31—Nano- or microengines
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0063—Switches making use of microelectromechanical systems [MEMS] having electrostatic latches, i.e. the activated position is kept by electrostatic forces other than the activation force
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay
    • H01H2061/008—Micromechanical actuator with a cold and a hot arm, coupled together at one end

Abstract

A thermal microactuator is provided that can be deflected in multiple positions. The actuator has a hot arm and a cold arm coupled together at their distal ends suspended above a reference plane of a substrate. A potential difference is applied across the hot arm so that a current circulates through the hot arm but not the cold arm.
PCT/US2003/011876 2002-04-30 2003-04-17 Thermal micro-actuator based on selective electrical excitation WO2003093165A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003228562A AU2003228562A1 (en) 2002-04-30 2003-04-17 Thermal micro-actuator based on selective electrical excitation

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/137,771 2002-04-30
US10/137,771 US6739132B2 (en) 2002-04-30 2002-04-30 Thermal micro-actuator based on selective electrical excitation

Publications (2)

Publication Number Publication Date
WO2003093165A2 WO2003093165A2 (en) 2003-11-13
WO2003093165A3 true WO2003093165A3 (en) 2004-04-08

Family

ID=29249758

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/011876 WO2003093165A2 (en) 2002-04-30 2003-04-17 Thermal micro-actuator based on selective electrical excitation

Country Status (3)

Country Link
US (1) US6739132B2 (en)
AU (1) AU2003228562A1 (en)
WO (1) WO2003093165A2 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7028474B2 (en) * 1998-10-16 2006-04-18 Silverbook Research Pty Ltd Micro-electromechanical actuator with control logic circuitry
ATE367927T1 (en) * 1998-10-16 2007-08-15 Silverbrook Res Pty Ltd METHOD FOR PRODUCING A NOZZLE FOR AN INK JET PRINT HEAD
US7480432B2 (en) * 2006-02-28 2009-01-20 Corning Incorporated Glass-based micropositioning systems and methods
GB0610392D0 (en) 2006-05-25 2006-07-05 Univ Durham Electro-mechanical actuator and apparatus incorporating such device
US7724121B2 (en) * 2006-09-07 2010-05-25 Innovative Micro Technology Singly attached MEMS thermal device and method of manufacture
US8120133B2 (en) * 2006-09-11 2012-02-21 Alcatel Lucent Micro-actuator and locking switch
US20080197964A1 (en) * 2007-02-21 2008-08-21 Simpler Networks Inc. Mems actuators and switches
US8154378B2 (en) * 2007-08-10 2012-04-10 Alcatel Lucent Thermal actuator for a MEMS-based relay switch
US10018238B2 (en) * 2013-11-01 2018-07-10 Sabanci University Variable negative stiffness actuation
WO2019108889A1 (en) * 2017-12-02 2019-06-06 Bellutech Llc Sensing devices, sensors, and methods for monitoring environmental conditions
US11011323B2 (en) 2017-12-02 2021-05-18 Bellutech Llc Sensing devices, sensors, and methods for monitoring environmental conditions
CN109756147B (en) * 2018-12-13 2020-03-31 西安交通大学 Electric actuating inchworm bionic structure based on liquid crystal elastic polymer and manufacturing process

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010010488A1 (en) * 1999-03-26 2001-08-02 Minners R. Sjhon Bistable micro-switch and method of manufacturing the same
US6275325B1 (en) * 2000-04-07 2001-08-14 Microsoft Corporation Thermally activated microelectromechanical systems actuator
WO2002023574A1 (en) * 2000-09-12 2002-03-21 3M Innovative Properties Company Direct acting vertical thermal actuator

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4423401A (en) 1982-07-21 1983-12-27 Tektronix, Inc. Thin-film electrothermal device
US5347485A (en) 1992-03-03 1994-09-13 Mitsubishi Denki Kabushiki Kaisha Magnetic thin film memory
US5343422A (en) 1993-02-23 1994-08-30 International Business Machines Corporation Nonvolatile magnetoresistive storage device using spin valve effect
US6021065A (en) 1996-09-06 2000-02-01 Nonvolatile Electronics Incorporated Spin dependent tunneling memory
US5949707A (en) 1996-09-06 1999-09-07 Nonvolatile Electronics, Incorporated Giant magnetoresistive effect memory cell
US6275411B1 (en) 1993-07-23 2001-08-14 Nonvolatile Electronics, Incorporated Spin dependent tunneling memory
US5477482A (en) 1993-10-01 1995-12-19 The United States Of America As Represented By The Secretary Of The Navy Ultra high density, non-volatile ferromagnetic random access memory
US5541868A (en) 1995-02-21 1996-07-30 The United States Of America As Represented By The Secretary Of The Navy Annular GMR-based memory element
DE19701509C2 (en) 1996-01-19 2003-08-21 Fujitsu Ltd magnetic sensors
US5640343A (en) 1996-03-18 1997-06-17 International Business Machines Corporation Magnetic memory array using magnetic tunnel junction devices in the memory cells
US5650958A (en) 1996-03-18 1997-07-22 International Business Machines Corporation Magnetic tunnel junctions with controlled magnetic response
US5966322A (en) 1996-09-06 1999-10-12 Nonvolatile Electronics, Incorporated Giant magnetoresistive effect memory cell
US5734605A (en) 1996-09-10 1998-03-31 Motorola, Inc. Multi-layer magnetic tunneling junction memory cells
US5909078A (en) 1996-12-16 1999-06-01 Mcnc Thermal arched beam microelectromechanical actuators
US5994816A (en) 1996-12-16 1999-11-30 Mcnc Thermal arched beam microelectromechanical devices and associated fabrication methods
AUPO794797A0 (en) 1997-07-15 1997-08-07 Silverbrook Research Pty Ltd A device (MEMS07)
US6147900A (en) 1997-11-06 2000-11-14 Nonvolatile Electronics, Incorporated Spin dependent tunneling memory
US5959376A (en) 1998-09-10 1999-09-28 Sandia Corporation Microelectromechanical reciprocating-tooth indexing apparatus
US6211598B1 (en) * 1999-09-13 2001-04-03 Jds Uniphase Inc. In-plane MEMS thermal actuator and associated fabrication methods
US6485273B1 (en) * 2000-09-01 2002-11-26 Mcnc Distributed MEMS electrostatic pumping devices
US6438954B1 (en) * 2001-04-27 2002-08-27 3M Innovative Properties Company Multi-directional thermal actuator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010010488A1 (en) * 1999-03-26 2001-08-02 Minners R. Sjhon Bistable micro-switch and method of manufacturing the same
US6275325B1 (en) * 2000-04-07 2001-08-14 Microsoft Corporation Thermally activated microelectromechanical systems actuator
WO2002023574A1 (en) * 2000-09-12 2002-03-21 3M Innovative Properties Company Direct acting vertical thermal actuator

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
HOFFMANN M ET AL: "Bistable micromechanical fiber-optic switches on silicon with thermal actuators", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 78, no. 1, January 1999 (1999-01-01), pages 28 - 35, XP004244577, ISSN: 0924-4247 *
KOLESAR E S ET AL: "In-plane tip deflection and force achieved with asymmetrical polysilicon electrothermal microactuators", THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, vol. 377-378, 1 December 2000 (2000-12-01), pages 719 - 726, XP004226779, ISSN: 0040-6090 *
MATOBA H ET AL: "A bistable snapping microactuator", MICRO ELECTRO MECHANICAL SYSTEMS, 1994, MEMS '94, PROCEEDINGS, IEEE WORKSHOP ON OISO, JAPAN 25-28 JAN. 1994, NEW YORK, NY, USA,IEEE, PAGE(S) 45-50, ISBN: 0-7803-1833-1, XP010207742 *

Also Published As

Publication number Publication date
US20030200749A1 (en) 2003-10-30
WO2003093165A2 (en) 2003-11-13
AU2003228562A1 (en) 2003-11-17
US6739132B2 (en) 2004-05-25

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