WO2004030083A3 - User interface for quantifying wafer non-uniformities and graphically explore significance - Google Patents
User interface for quantifying wafer non-uniformities and graphically explore significance Download PDFInfo
- Publication number
- WO2004030083A3 WO2004030083A3 PCT/US2003/030456 US0330456W WO2004030083A3 WO 2004030083 A3 WO2004030083 A3 WO 2004030083A3 US 0330456 W US0330456 W US 0330456W WO 2004030083 A3 WO2004030083 A3 WO 2004030083A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- wafer
- user interface
- uniformities
- wafer non
- analysis
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
Abstract
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020057005323A KR101127779B1 (en) | 2002-09-26 | 2003-09-24 | User interface for quantifying wafer non-uniformities and graphically explore significance |
JP2005501992A JP2006515468A (en) | 2002-09-26 | 2003-09-24 | User interface for non-uniformity quantification and significance illustration for wafers |
AU2003299056A AU2003299056A1 (en) | 2002-09-26 | 2003-09-24 | User interface for quantifying wafer non-uniformities and graphically explore significance |
EP03756878A EP1543550A2 (en) | 2002-09-26 | 2003-09-24 | User interface for quantifying wafer non-uniformities and graphically explore significance |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US41402102P | 2002-09-26 | 2002-09-26 | |
US60/414,021 | 2002-09-26 | ||
US10/331,194 US7239737B2 (en) | 2002-09-26 | 2002-12-24 | User interface for quantifying wafer non-uniformities and graphically explore significance |
US10/331,194 | 2002-12-24 | ||
US10/452,248 | 2003-05-30 | ||
US10/452,248 US7738693B2 (en) | 2002-12-24 | 2003-05-30 | User interface for wafer data analysis and visualization |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2004030083A2 WO2004030083A2 (en) | 2004-04-08 |
WO2004030083A3 true WO2004030083A3 (en) | 2004-07-15 |
Family
ID=32045857
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2003/030456 WO2004030083A2 (en) | 2002-09-26 | 2003-09-24 | User interface for quantifying wafer non-uniformities and graphically explore significance |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1543550A2 (en) |
JP (1) | JP2006515468A (en) |
KR (1) | KR101127779B1 (en) |
AU (1) | AU2003299056A1 (en) |
TW (1) | TWI229914B (en) |
WO (1) | WO2004030083A2 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4290204B2 (en) * | 2007-02-13 | 2009-07-01 | 東京エレクトロン株式会社 | Substrate processing apparatus setting operation support apparatus, setting operation support method, and storage medium for storing program |
JP5597056B2 (en) * | 2010-08-02 | 2014-10-01 | 株式会社キーエンス | Image measuring apparatus, image measuring method, and program for image measuring apparatus |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0398781A2 (en) * | 1989-05-19 | 1990-11-22 | Eastman Kodak Company | Method and apparatus for low angle, high resolution surface inspection |
US5761064A (en) * | 1995-10-06 | 1998-06-02 | Advanced Micro Devices, Inc. | Defect management system for productivity and yield improvement |
US5939719A (en) * | 1992-03-13 | 1999-08-17 | Thermomicroscopes Corporation | Scanning probe microscope with scan correction |
US20010000460A1 (en) * | 1989-07-12 | 2001-04-26 | Kazuko Ishihara | Semiconductor failure analysis system |
US20010001015A1 (en) * | 1989-07-12 | 2001-05-10 | Seiji Ishikawa | Inspection data analyzing system |
US20020051565A1 (en) * | 2000-10-26 | 2002-05-02 | Takashi Hiroi | Circuit pattern inspection method and apparatus |
US20020102747A1 (en) * | 2000-09-18 | 2002-08-01 | David Muradian | Correction of overlay offset between inspection layers in integrated circuits |
US6477685B1 (en) * | 1999-09-22 | 2002-11-05 | Texas Instruments Incorporated | Method and apparatus for yield and failure analysis in the manufacturing of semiconductors |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1145919A (en) * | 1997-07-24 | 1999-02-16 | Hitachi Ltd | Manufacture of semiconductor substrate |
JP4206192B2 (en) * | 2000-11-09 | 2009-01-07 | 株式会社日立製作所 | Pattern inspection method and apparatus |
JP4006119B2 (en) * | 1998-11-30 | 2007-11-14 | 株式会社日立製作所 | Circuit pattern inspection apparatus and circuit pattern inspection method |
JP4041630B2 (en) | 1998-11-30 | 2008-01-30 | 株式会社日立製作所 | Circuit pattern inspection apparatus and inspection method |
JP3996728B2 (en) * | 2000-03-08 | 2007-10-24 | 株式会社日立製作所 | Surface inspection apparatus and method |
JP4526661B2 (en) * | 2000-06-28 | 2010-08-18 | 株式会社日立製作所 | Inspection apparatus and inspection method |
-
2003
- 2003-09-24 JP JP2005501992A patent/JP2006515468A/en active Pending
- 2003-09-24 EP EP03756878A patent/EP1543550A2/en not_active Withdrawn
- 2003-09-24 KR KR1020057005323A patent/KR101127779B1/en active IP Right Grant
- 2003-09-24 AU AU2003299056A patent/AU2003299056A1/en not_active Abandoned
- 2003-09-24 WO PCT/US2003/030456 patent/WO2004030083A2/en active Application Filing
- 2003-09-26 TW TW092126645A patent/TWI229914B/en not_active IP Right Cessation
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0398781A2 (en) * | 1989-05-19 | 1990-11-22 | Eastman Kodak Company | Method and apparatus for low angle, high resolution surface inspection |
US20010000460A1 (en) * | 1989-07-12 | 2001-04-26 | Kazuko Ishihara | Semiconductor failure analysis system |
US20010001015A1 (en) * | 1989-07-12 | 2001-05-10 | Seiji Ishikawa | Inspection data analyzing system |
US5939719A (en) * | 1992-03-13 | 1999-08-17 | Thermomicroscopes Corporation | Scanning probe microscope with scan correction |
US5761064A (en) * | 1995-10-06 | 1998-06-02 | Advanced Micro Devices, Inc. | Defect management system for productivity and yield improvement |
US6477685B1 (en) * | 1999-09-22 | 2002-11-05 | Texas Instruments Incorporated | Method and apparatus for yield and failure analysis in the manufacturing of semiconductors |
US20020102747A1 (en) * | 2000-09-18 | 2002-08-01 | David Muradian | Correction of overlay offset between inspection layers in integrated circuits |
US20020051565A1 (en) * | 2000-10-26 | 2002-05-02 | Takashi Hiroi | Circuit pattern inspection method and apparatus |
Non-Patent Citations (2)
Title |
---|
DATABASE INSPEC [online] INSTITUTE OF ELECTRICAL ENGINEERS, STEVENAGE, GB; RODGERS M R ET AL: "Application of the atomic force microscope to integrated circuit failure analysis", XP002277053, Database accession no. 4506485 * |
MICROELECTRONICS AND RELIABILITY, SEPT. 1993, UK, vol. 33, no. 11-12, pages 1947 - 1956, ISSN: 0026-2714 * |
Also Published As
Publication number | Publication date |
---|---|
TWI229914B (en) | 2005-03-21 |
KR101127779B1 (en) | 2012-03-27 |
WO2004030083A2 (en) | 2004-04-08 |
KR20050084603A (en) | 2005-08-26 |
EP1543550A2 (en) | 2005-06-22 |
AU2003299056A1 (en) | 2004-04-19 |
JP2006515468A (en) | 2006-05-25 |
TW200414395A (en) | 2004-08-01 |
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