WO2004059727A1 - Methods of forming structure and spacer and related finfet - Google Patents
Methods of forming structure and spacer and related finfet Download PDFInfo
- Publication number
- WO2004059727A1 WO2004059727A1 PCT/US2002/040869 US0240869W WO2004059727A1 WO 2004059727 A1 WO2004059727 A1 WO 2004059727A1 US 0240869 W US0240869 W US 0240869W WO 2004059727 A1 WO2004059727 A1 WO 2004059727A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- spacer
- gate
- fin
- forming
- overhang
- Prior art date
Links
- 125000006850 spacer group Chemical group 0.000 title claims abstract description 71
- 238000000034 method Methods 0.000 title claims abstract description 45
- 239000000463 material Substances 0.000 claims description 93
- 230000003647 oxidation Effects 0.000 claims description 13
- 238000007254 oxidation reaction Methods 0.000 claims description 13
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 12
- 238000005530 etching Methods 0.000 claims description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000002019 doping agent Substances 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 4
- 230000001590 oxidative effect Effects 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- 239000005380 borophosphosilicate glass Substances 0.000 claims description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 2
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 claims description 2
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims description 2
- 229910052786 argon Inorganic materials 0.000 claims description 2
- 229910052785 arsenic Inorganic materials 0.000 claims description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 2
- 229910052792 caesium Inorganic materials 0.000 claims description 2
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 claims description 2
- 229910052732 germanium Inorganic materials 0.000 claims description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 6
- 229910052710 silicon Inorganic materials 0.000 abstract description 6
- 239000010703 silicon Substances 0.000 abstract description 6
- 230000003628 erosive effect Effects 0.000 abstract description 4
- 238000002513 implantation Methods 0.000 abstract description 4
- 238000010276 construction Methods 0.000 abstract description 2
- 238000004513 sizing Methods 0.000 abstract description 2
- 229920005591 polysilicon Polymers 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000005755 formation reaction Methods 0.000 description 4
- 239000002243 precursor Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000005360 phosphosilicate glass Substances 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- 206010010144 Completed suicide Diseases 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/785—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26586—Bombardment with radiation with high-energy radiation producing ion implantation characterised by the angle between the ion beam and the crystal planes or the main crystal surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823437—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42384—Gate electrodes for field effect devices for field-effect transistors with insulated gate for thin film field effect transistors, e.g. characterised by the thickness or the shape of the insulator or the dimensions, the shape or the lay-out of the conductor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66787—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel
- H01L29/66795—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- High Energy & Nuclear Physics (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Thin Film Transistor (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
Description
Claims
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US2002/040869 WO2004059727A1 (en) | 2002-12-19 | 2002-12-19 | Methods of forming structure and spacer and related finfet |
AU2002364088A AU2002364088A1 (en) | 2002-12-19 | 2002-12-19 | Methods of forming structure and spacer and related finfet |
EP02798557A EP1573804A4 (en) | 2002-12-19 | 2002-12-19 | Methods of forming structure and spacer and related finfet |
US10/538,911 US20060154423A1 (en) | 2002-12-19 | 2002-12-19 | Methods of forming structure and spacer and related finfet |
CNB028300432A CN1320641C (en) | 2002-12-19 | 2002-12-19 | Methods for forming structure and spacer and related FINFET |
JP2004563141A JP4410685B2 (en) | 2002-12-19 | 2002-12-19 | Method for forming a fin-type FET |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US2002/040869 WO2004059727A1 (en) | 2002-12-19 | 2002-12-19 | Methods of forming structure and spacer and related finfet |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2004059727A1 true WO2004059727A1 (en) | 2004-07-15 |
Family
ID=32679934
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2002/040869 WO2004059727A1 (en) | 2002-12-19 | 2002-12-19 | Methods of forming structure and spacer and related finfet |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP1573804A4 (en) |
JP (1) | JP4410685B2 (en) |
CN (1) | CN1320641C (en) |
AU (1) | AU2002364088A1 (en) |
WO (1) | WO2004059727A1 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1683186A2 (en) * | 2003-10-28 | 2006-07-26 | Freescale Semiconductor, Inc. | Confined spacers for double gate transistor semiconductor fabrication process |
US7473593B2 (en) | 2006-01-11 | 2009-01-06 | International Business Machines Corporation | Semiconductor transistors with expanded top portions of gates |
US9564370B1 (en) | 2015-10-20 | 2017-02-07 | International Business Machines Corporation | Effective device formation for advanced technology nodes with aggressive fin-pitch scaling |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7341902B2 (en) * | 2006-04-21 | 2008-03-11 | International Business Machines Corporation | Finfet/trigate stress-memorization method |
KR100801315B1 (en) | 2006-09-29 | 2008-02-05 | 주식회사 하이닉스반도체 | Method of fabricating semiconductor device with the finfet transistor |
KR100838378B1 (en) * | 2006-09-29 | 2008-06-13 | 주식회사 하이닉스반도체 | Method for fabricating fin transistor |
US8889495B2 (en) * | 2012-10-04 | 2014-11-18 | International Business Machines Corporation | Semiconductor alloy fin field effect transistor |
KR102030329B1 (en) * | 2013-05-30 | 2019-11-08 | 삼성전자 주식회사 | Semiconductor device and method for fabricating the same |
US9773869B2 (en) * | 2014-03-12 | 2017-09-26 | Samsung Electronics Co., Ltd. | Semiconductor device and method of fabricating the same |
WO2016048336A1 (en) * | 2014-09-26 | 2016-03-31 | Intel Corporation | Selective gate spacers for semiconductor devices |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6475890B1 (en) * | 2001-02-12 | 2002-11-05 | Advanced Micro Devices, Inc. | Fabrication of a field effect transistor with an upside down T-shaped semiconductor pillar in SOI technology |
US6475869B1 (en) * | 2001-02-26 | 2002-11-05 | Advanced Micro Devices, Inc. | Method of forming a double gate transistor having an epitaxial silicon/germanium channel region |
US6562665B1 (en) * | 2000-10-16 | 2003-05-13 | Advanced Micro Devices, Inc. | Fabrication of a field effect transistor with a recess in a semiconductor pillar in SOI technology |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3393286B2 (en) * | 1995-09-08 | 2003-04-07 | ソニー株式会社 | Pattern formation method |
US5567639A (en) * | 1996-01-04 | 1996-10-22 | Utron Technology Inc. | Method of forming a stack capacitor of fin structure for DRAM cell |
DE19717363C2 (en) * | 1997-04-24 | 2001-09-06 | Siemens Ag | Manufacturing process for a platinum metal structure using a lift-off process and use of the manufacturing process |
JP3519589B2 (en) * | 1997-12-24 | 2004-04-19 | 株式会社ルネサステクノロジ | Manufacturing method of semiconductor integrated circuit |
US5994192A (en) * | 1998-05-29 | 1999-11-30 | Vanguard International Semiconductor Corporation | Compensation of the channel region critical dimension, after polycide gate, lightly doped source and drain oxidation procedure |
DE10012112C2 (en) * | 2000-03-13 | 2002-01-10 | Infineon Technologies Ag | Bridge field effect transistor and method for producing a bridge field effect transistor |
US6492212B1 (en) * | 2001-10-05 | 2002-12-10 | International Business Machines Corporation | Variable threshold voltage double gated transistors and method of fabrication |
-
2002
- 2002-12-19 JP JP2004563141A patent/JP4410685B2/en not_active Expired - Fee Related
- 2002-12-19 EP EP02798557A patent/EP1573804A4/en not_active Withdrawn
- 2002-12-19 CN CNB028300432A patent/CN1320641C/en not_active Expired - Fee Related
- 2002-12-19 AU AU2002364088A patent/AU2002364088A1/en not_active Abandoned
- 2002-12-19 WO PCT/US2002/040869 patent/WO2004059727A1/en active Search and Examination
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6562665B1 (en) * | 2000-10-16 | 2003-05-13 | Advanced Micro Devices, Inc. | Fabrication of a field effect transistor with a recess in a semiconductor pillar in SOI technology |
US6475890B1 (en) * | 2001-02-12 | 2002-11-05 | Advanced Micro Devices, Inc. | Fabrication of a field effect transistor with an upside down T-shaped semiconductor pillar in SOI technology |
US6475869B1 (en) * | 2001-02-26 | 2002-11-05 | Advanced Micro Devices, Inc. | Method of forming a double gate transistor having an epitaxial silicon/germanium channel region |
Non-Patent Citations (1)
Title |
---|
See also references of EP1573804A4 * |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1683186A2 (en) * | 2003-10-28 | 2006-07-26 | Freescale Semiconductor, Inc. | Confined spacers for double gate transistor semiconductor fabrication process |
EP1683186A4 (en) * | 2003-10-28 | 2010-09-22 | Freescale Semiconductor Inc | Confined spacers for double gate transistor semiconductor fabrication process |
US7473593B2 (en) | 2006-01-11 | 2009-01-06 | International Business Machines Corporation | Semiconductor transistors with expanded top portions of gates |
US8466503B2 (en) | 2006-01-11 | 2013-06-18 | International Business Machines Corporation | Semiconductor transistors with expanded top portions of gates |
US8753929B2 (en) | 2006-01-11 | 2014-06-17 | International Business Machines Corporation | Structure fabrication method |
US9564370B1 (en) | 2015-10-20 | 2017-02-07 | International Business Machines Corporation | Effective device formation for advanced technology nodes with aggressive fin-pitch scaling |
US9953976B2 (en) | 2015-10-20 | 2018-04-24 | International Business Machines Corporation | Effective device formation for advanced technology nodes with aggressive fin-pitch scaling |
Also Published As
Publication number | Publication date |
---|---|
JP2006511092A (en) | 2006-03-30 |
AU2002364088A1 (en) | 2004-07-22 |
JP4410685B2 (en) | 2010-02-03 |
CN1714441A (en) | 2005-12-28 |
EP1573804A1 (en) | 2005-09-14 |
EP1573804A4 (en) | 2006-03-08 |
CN1320641C (en) | 2007-06-06 |
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