WO2004095499A3 - Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel - Google Patents

Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel Download PDF

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Publication number
WO2004095499A3
WO2004095499A3 PCT/US2004/011183 US2004011183W WO2004095499A3 WO 2004095499 A3 WO2004095499 A3 WO 2004095499A3 US 2004011183 W US2004011183 W US 2004011183W WO 2004095499 A3 WO2004095499 A3 WO 2004095499A3
Authority
WO
WIPO (PCT)
Prior art keywords
vessel
channel
reactive gas
plasma source
vacuum vessel
Prior art date
Application number
PCT/US2004/011183
Other languages
French (fr)
Other versions
WO2004095499A2 (en
Inventor
William M Holber
Xing Chen
Andrew B Cowe
Matthew M Besen
Jr Ronald W Collins
Susan C Trulli
Shouqian Shao
Original Assignee
Applied Science & Technology I
William M Holber
Xing Chen
Andrew B Cowe
Matthew M Besen
Jr Ronald W Collins
Susan C Trulli
Shouqian Shao
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Science & Technology I, William M Holber, Xing Chen, Andrew B Cowe, Matthew M Besen, Jr Ronald W Collins, Susan C Trulli, Shouqian Shao filed Critical Applied Science & Technology I
Priority to CN2004800100663A priority Critical patent/CN1774787B/en
Priority to EP04759827.1A priority patent/EP1618588B1/en
Priority to JP2006509918A priority patent/JP5301096B2/en
Publication of WO2004095499A2 publication Critical patent/WO2004095499A2/en
Publication of WO2004095499A3 publication Critical patent/WO2004095499A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32357—Generation remote from the workpiece, e.g. down-stream
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H01J37/32449—Gas control, e.g. control of the gas flow
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32467—Material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32522—Temperature

Abstract

Plasma ignition and cooling apparatus and methods for plasma systems are described. An apparatus (300) includes a vessel (310) and at least one ignition electrode (330) adjacent to the vessel. A total length of a dimension (D) of the at least one ignition electrode is greater than 10% of a length of the vessel's channel. The apparatus can include a dielectric toroidal vessel, a heat sink having multiple segments urged toward the vessel by a spring-loaded mechanism, and a thermal interface between the vessel and the heat sink. A method can include providing a gas having a flow rate and a pressure and directing a portion of the flow rate of the gas into a vessel channel. The gas is ignited in the channel while the remaining portion of the flow rate is directed away from the channel.
PCT/US2004/011183 2003-04-16 2004-04-12 Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel WO2004095499A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN2004800100663A CN1774787B (en) 2003-04-16 2004-04-12 Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel
EP04759827.1A EP1618588B1 (en) 2003-04-16 2004-04-12 Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel
JP2006509918A JP5301096B2 (en) 2003-04-16 2004-04-12 How to ignite plasma

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/417,408 US6872909B2 (en) 2003-04-16 2003-04-16 Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel
US10/417.408 2003-04-16

Publications (2)

Publication Number Publication Date
WO2004095499A2 WO2004095499A2 (en) 2004-11-04
WO2004095499A3 true WO2004095499A3 (en) 2005-02-10

Family

ID=33158894

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/011183 WO2004095499A2 (en) 2003-04-16 2004-04-12 Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel

Country Status (7)

Country Link
US (3) US6872909B2 (en)
EP (3) EP1618588B1 (en)
JP (5) JP5301096B2 (en)
KR (1) KR100810258B1 (en)
CN (3) CN102339717B (en)
TW (3) TWI359628B (en)
WO (1) WO2004095499A2 (en)

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