WO2006019571B1 - Variable focal length lens and lens array comprising discretely controlled micromirrors - Google Patents

Variable focal length lens and lens array comprising discretely controlled micromirrors

Info

Publication number
WO2006019571B1
WO2006019571B1 PCT/US2005/023920 US2005023920W WO2006019571B1 WO 2006019571 B1 WO2006019571 B1 WO 2006019571B1 US 2005023920 W US2005023920 W US 2005023920W WO 2006019571 B1 WO2006019571 B1 WO 2006019571B1
Authority
WO
WIPO (PCT)
Prior art keywords
lens
controlled
vsdcm
sedcm
micromirror
Prior art date
Application number
PCT/US2005/023920
Other languages
French (fr)
Other versions
WO2006019571A3 (en
WO2006019571A2 (en
Inventor
Gyoung Ii Cho
Dong Woo Gim
Tae Hyeon Kim
Cheong Soo Seo
Original Assignee
Stereo Display Inc
Angstrom Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stereo Display Inc, Angstrom Inc filed Critical Stereo Display Inc
Priority to CA002574063A priority Critical patent/CA2574063A1/en
Priority to EP05764421A priority patent/EP1774390A2/en
Priority to BRPI0513404-8A priority patent/BRPI0513404A/en
Priority to MX2007000630A priority patent/MX2007000630A/en
Priority to KR1020077003837A priority patent/KR20070035089A/en
Priority to JP2007521498A priority patent/JP2008506989A/en
Publication of WO2006019571A2 publication Critical patent/WO2006019571A2/en
Publication of WO2006019571A3 publication Critical patent/WO2006019571A3/en
Publication of WO2006019571B1 publication Critical patent/WO2006019571B1/en
Priority to IL180719A priority patent/IL180719A0/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/12—Fluid-filled or evacuated lenses
    • G02B3/14—Fluid-filled or evacuated lenses of variable focal length
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/09—Multifaceted or polygonal mirrors, e.g. polygonal scanning mirrors; Fresnel mirrors

Abstract

A Discretely Controlled Micromirror Array Lens (DCMAL) consists of many Discretely Controlled Micromirrors (DCMs) and actuating components. The actuating components control the positions of DCMs electrostatically. The optical efficiency of the DCMAL is increased by locating a mechanical structure upholding DCMs and the actuating components under DCMs to increase an effective reflective area. The known microelectronics technologies can remove the loss in effective reflective area due to electrode pads and wires. The lens can correct aberrations by controlling DCMs independently. Independent control of each DCM is possible by known microelectronics technologies. The DCM array can also form a lens with arbitrary shape and/or size, or a lens array comprising the lenses with arbitrary shape and/or size.

Claims

AMENDED CLAIMS received by the International Bureau on 21 April 2006 (21.04.06)
[ 1 ] A variable focal length lens comprising a plurality of Variably Supported
Discretely Controlled Micromirrors (VSDCMs) wherein the VSDCM comprises a) a micromirror; and b) a plurality of variable supports on which the micromirror rests; wherein the variable supports determine the position of the micromirror.
[2] The variable focal length lens of claim 1 , wherein the variable supports are located under the micromirror. [3] The variable focal length lens of claim 1 , wherein each of the variable supports is controlled to change its height whereby the position of the micromirror is controlled. [4] A variable focal length lens comprising a plurality of Segmented Electrode
Discretely Controlled Micromirror (SEDCM), wherein the SEDCM comprises: a) a micromirror; and b) a plurality of segmented electrodes; wherein the size and/or position of the segmented electrodes determines the position of the micromirror- wherein the applied voltage to segmented electrodes is digital and/or discrete.
[5] The lens of claim 1, wherein the rotation of the VRDCM is controlled.
[6] The lens of claim 1 , wherein the translation of the VSDCM is controlled.
[7 ] The lens of claim I , wherein the rotation and translation of the VSDCM arc controlled. [8] The lens of claim I , wherein two degrees of freedom rotation of the VSDCM is controlled. [9] The lens of claim 1 , wherein two degrees of freedom rotation and one degree of freedom translation of the VSDCM are controlled.
[ 10] The lens, of claim 1 , wherein the VSDCMs are controlled independently.
[11] The lens of claim 1 , wherein the VSDCM is actuated by electrostatic force.
[121 The lens of claim 1 , wherein the VSDCMs are arranged to form one or more concentric circles to form the lens. [13] The lens of claim 12, wherein the VSDCMs on same concentric circles are controlled by the same electrodes. [ 14] The lens of claim 1 , wherein a control circuitry is provided under the tnicromirrors, wherein the control circuitry is made with microelectronics fabrication technologies. [151 The lens of claim 1, wherein the reflective surface of the VSDCM is substantially flat.
[ 16] The lens of claim 1 , wherein the re flecti ve surface of the VSDCM has a curvature.
[17] The lens of claim 16, wherein curvature of the VSDCM is controlled.
[18] The lens of claim 17, wherein the curvature of the VSDCM is controlled by electrothermal force. [19] The lens of claim 17, wherein the curvature of the VSDCM is controlled by electrostatic force.
[2Oj The lens of claim I, wherein the VSDCM has a fan shape.
[21 ] The lens o f claim 1 , wherein the VSDCM has a hexagonal shape,
[22] The lens of claim 1 , wherein the VSDCM has a rectangular shape.
[23] The lens of claim 1 , wherein the VSDCM has a square shape.
[24] The lens of claim 1 , wherein the VSDCM has a triangular shape.
[25] The lens of claim 1, wherein the lens has an arbitrary size and/or shape.
[26] The lens of claim 1, wherein all the VSDCMs are arranged in a flat plane.
[27] The lens of claim 1 , wherein the surface material of the VSDCM is the one with high reflectivity.
|28] The lens of claim 1, wherein the surface material of the VSDCM is metal.
[29] The lens of claim 1 , wherein the surface material o f the VSDCM is metal compound. [30] The lens of claim 1, wherein the surface of the VSDCM is made by multi-layered dielectric coating. [31 ] The lens o f claim 1 , wherein a mechanical structure upholding the micromirror and actuating components are located under the micromirror. [32] The lens of claim 1 , wherein the lens is an adaptive optical component, wherein the lens compensates for phase errors of light due to the medium between an object and its image. [33] The lens of claim 1, wherein the lens is an adaptive optical component, wherein the lens corrects aberrations. [34] The lens of claim 1 , wherein the lens is an adaptive optical component, wherein the lens corrects the defects of an imaging system that cause the image to deviate from the rules of paraxial imagery. [35] The lens of claim 1 , wherein the lens is controlled to satisfy the same phase condition for each wavelength of Red, Green, and Blue (RGB), respectively, to get a color image, [36] The lens of claim 1 , wherein the lens is controlled to satisfy the same phase condition for one wavelength among Red, Green, and Blue (RGB) to get a color image, [37] The lens of claim 1 , wherein the same phase condition for color imaging is satisfied by using the least common multiple of wavelengths of Red, Green, and
Blue lights as an effective wavelength for the phase condition. [38] The lens of claim 1 , wherein the lens is an adaptive optical component, wherein an object which does not lie on the optical axis can be imaged by the lens without macroscopic mechanical movement. [39] A lens array comprising variable focal length lenses, wherein each of the variable focal length lenses comprises a plurality of Variably Supported Discretely
Controlled Micromirrors (VSDCMs), wherein the VSDCM comprises a) a micromirror; and b) a plurality of variable supports on which the micrormtror rests; wherein the variable supports determine the position of the micromirror.
[40] The lens array of claim 39, wherein each variable focal length has independent focal length variation.
[41] The lens array of claim 39, wherein the rotation of the VSDCM is controlled,
[42] The lens array of claim 39, wherein the translation of the VSDCM is controlled,
[43] The lens array of claim 39, wherein the rotation and translation of the VSDCM are controlled. [44] The lens array of claim 39, wherein two degrees of freedom rotation of the
VSDCM is controlled. [45] The lens array of claim 39, wherein two degrees of freedom rotation and one degree of freedom translation of the VSDCM are controlled.
[46] The lens array of claim 39, wherein the VSDCMs are controlled independently.
[47] The lens array of claim 39, wherein the VSDCMs arc actuated by electrostatic force. [48] The lens array of claim 39, wherein a control circuitry is provided under the mic iromirrors, wherein the control circuitry is made with microelectronics fabrication technologies. [49] The lens array of claim 39, wherein, the lens is an adaptive optical component, wherein the lens corrects aberrations. [50] The lens of claim 4, wherein the each mi cromirror of the variable focal length lens can have different displacements each other with digital voltage. [511 The lens of claim 4, wherein the rotation of the SEDCM is controlled.
[52] The lens of claim 4, wherein the translation of the SEDCM is controlled.
[53] The lens of claim 4, wherein the rotation and translation of the SEDCM are controlled. [54] The lens of claim 4, wherein two degrees of freedom rotation of the SEDCM is controlled. [55] The lens of claim 47 wherein two degrees of freedom rotation and one degree of freedom translation of the SEDCM arc controlled.
[56] The lens of claim 4, wherein the SEDCMs aϊe controlled independently.
[57] The lens of claim 4, wherein the SEDCM is actuated by electrostatic force.
[58] The lens of claim 4, wherein the SEDCMs are arranged to form one or more concentric circles to form the lens. [59] The lens of claim 58, wherein the SEDCMs on same concentric circles axe controlled by the same electrodes. [60] The lens of claim 4, wherein a control circuitry is provided under the microm irrors, wherein the control circuitry is made with microelectronics fabrication technologies. [61 ] The lens of claim 4, wherein the reflective surface of the SEDCM is substantially flat. [62] The lens of claim 4, wherein the reflective surface of the SEDCM has a curvature. [63] The lens of claim 62, wherein curvature of the SEDCM is controlled.
[64] The lens of claim 63, wherein ihc curvature of the SEDCM is controlled by electrothermal force. [65] The leas of claim 63, wherein the curvature of the SEDCM is controlled by electrostatic force.
[66] The lens of claim 4, wherein the SEDCM has a fan shape.
[67] The lens of claim 4, wherein the SEDCM has a hexagonal shape.
[68] The lens of claim 4, wherein the SEDCM has a rectangular shape.
[69] The lens of claim 4, wherein the SEDCM has a square shape.
[70] The lens of claim 4, wherein the SFDCM has a triangular shape.
[71] The lens of claim 4, wherein the lens has an arbitrary size and/or shape.
[72] The lens of claim 4, wherein all SEDCMs arc arranged in a flat plane.
[73] The lens of claim 4, wherein the surface material of the SEDCM is the one with high reflectivity.
[74] The lens of claim 4, wherein the surface material of the SEDCM is metal.
[75] The lens of claim 4, wherein the surface material of the SEDCM is metal compound, [76] The lens of claim 4, wherein the surface of the SEDCM is made by multi-layered dielectric coating, [77] The lens of claim 4, wherein a mechanical structure upholding the micromtrror and actuating components are located under the micromirror. [78] The lens of claim 4, wherein the lens is an adaptive optical component, wherein the lens compensates for phase errors of light due to the medium between an object and its image. [79] he lens of claim 4, wherein the lens is an adaptive optical component, wherein the lens corrects aberrations. [80] The lens of claim 4, wherein the lens is an adaptive optical component, wherein the lens corrects the defects of an imaging system that cause the image to deviate from the rules of paraxial imagery. [81 ] The lens of claim 4, wherein the lens is controlled to satisfy the same phase condition for each wavelength of Red, Green, and Blue (RGB), respectively, to get a color image. [82] The lens of claim 4, wherein the lens is controlled to satisfy the same phase condition for one wavelength among Red. Green, and Blue (RGB) to get a color image. [83] The lens of claim 4, wherein the same phase condition for color imaging is satisfied by using the least common multiple of wavelengths of Red, Green, and
Blue lights as an effective wavelength for the phase condition. [841 The lens of claim 4, whetein the lens is an adaptive optical component, wherein an object which does not He on the optical axis can be imaged by the lens without macroscopic mechanical movement. [85] A lens array comprising variable focal length lenses, wherein each of the variable focal length lenses comprising a plurality of Segmented Electrode Discretely
Controlled Micromirror (SEDCM), wherein the SBDCM comprises: a) a micromirror" and b) a plurality o f segmented electrodes; wherein the size and/or position of the segmented electrodes determines the position of the micromirror, wherein the applied voltage to segmented electrodes is digital and/or discrete,
PCT/US2005/023920 2004-07-16 2005-07-06 Variable focal length lens and lens array comprising discretely controlled micromirrors WO2006019571A2 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
CA002574063A CA2574063A1 (en) 2004-07-16 2005-07-06 Variable focal length lens and lens array comprising discretely controlled micromirrors
EP05764421A EP1774390A2 (en) 2004-07-16 2005-07-06 Variable focal length lens and lens array comprising discretely controlled micromirrors
BRPI0513404-8A BRPI0513404A (en) 2004-07-16 2005-07-06 variable focal length lens and lens assembly
MX2007000630A MX2007000630A (en) 2004-07-16 2005-07-06 Variable focal length lens and lens array comprising discretely controlled micromirrors.
KR1020077003837A KR20070035089A (en) 2004-07-16 2005-07-06 Variable Focal Length Lenses and Lens Arrays with Discontinuously Controlled Micromirrors
JP2007521498A JP2008506989A (en) 2004-07-16 2005-07-06 Lens array with variable focal length lens and individually controlled micromirrors
IL180719A IL180719A0 (en) 2004-07-16 2007-01-15 Variable focal length lens and lens array comprising discretely controlled micromirrors

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/893,039 US7239438B2 (en) 2004-07-16 2004-07-16 Variable focal length lens and lens array comprising discretely controlled micromirrors
US10/893,039 2004-07-16

Publications (3)

Publication Number Publication Date
WO2006019571A2 WO2006019571A2 (en) 2006-02-23
WO2006019571A3 WO2006019571A3 (en) 2006-04-13
WO2006019571B1 true WO2006019571B1 (en) 2006-06-29

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/023920 WO2006019571A2 (en) 2004-07-16 2005-07-06 Variable focal length lens and lens array comprising discretely controlled micromirrors

Country Status (11)

Country Link
US (2) US7239438B2 (en)
EP (1) EP1774390A2 (en)
JP (1) JP2008506989A (en)
KR (1) KR20070035089A (en)
CN (1) CN101023386A (en)
BR (1) BRPI0513404A (en)
CA (1) CA2574063A1 (en)
IL (1) IL180719A0 (en)
MX (1) MX2007000630A (en)
TW (1) TWI290236B (en)
WO (1) WO2006019571A2 (en)

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Also Published As

Publication number Publication date
WO2006019571A3 (en) 2006-04-13
CA2574063A1 (en) 2006-02-23
MX2007000630A (en) 2007-03-30
TWI290236B (en) 2007-11-21
US7411718B2 (en) 2008-08-12
US7239438B2 (en) 2007-07-03
BRPI0513404A (en) 2008-05-06
CN101023386A (en) 2007-08-22
US20070217043A1 (en) 2007-09-20
JP2008506989A (en) 2008-03-06
EP1774390A2 (en) 2007-04-18
US20060012852A1 (en) 2006-01-19
TW200619674A (en) 2006-06-16
WO2006019571A2 (en) 2006-02-23
IL180719A0 (en) 2007-06-03
KR20070035089A (en) 2007-03-29

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