WO2006130665A3 - Microelectromechanical systems (mems) device including a superlattice and associated methods - Google Patents

Microelectromechanical systems (mems) device including a superlattice and associated methods Download PDF

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Publication number
WO2006130665A3
WO2006130665A3 PCT/US2006/021082 US2006021082W WO2006130665A3 WO 2006130665 A3 WO2006130665 A3 WO 2006130665A3 US 2006021082 W US2006021082 W US 2006021082W WO 2006130665 A3 WO2006130665 A3 WO 2006130665A3
Authority
WO
WIPO (PCT)
Prior art keywords
superlattice
mems
device including
associated methods
microelectromechanical systems
Prior art date
Application number
PCT/US2006/021082
Other languages
French (fr)
Other versions
WO2006130665A2 (en
Inventor
Richard A Blanchard
Original Assignee
Rj Mears Llc
Richard A Blanchard
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rj Mears Llc, Richard A Blanchard filed Critical Rj Mears Llc
Priority to JP2008513842A priority Critical patent/JP2008545542A/en
Priority to CN2006800188160A priority patent/CN101258100B/en
Priority to EP06760587A priority patent/EP1896361A2/en
Priority to CA002609614A priority patent/CA2609614A1/en
Priority to AU2006252590A priority patent/AU2006252590A1/en
Publication of WO2006130665A2 publication Critical patent/WO2006130665A2/en
Publication of WO2006130665A3 publication Critical patent/WO2006130665A3/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements

Abstract

A microelectromechanical system (MEMS) device may include a substrate and at least one movable member supported by the substrate. The at least one movable member may include a superlattice including a plurality of stacked groups of layers with each group of layers of the superlattice comprising a plurality of stacked base semiconductor monolayers defining a base semiconductor portion, and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions.
PCT/US2006/021082 2005-05-31 2006-05-31 Microelectromechanical systems (mems) device including a superlattice and associated methods WO2006130665A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2008513842A JP2008545542A (en) 2005-05-31 2006-05-31 Microelectromechanical system (MEMS) device having a superlattice and related methods
CN2006800188160A CN101258100B (en) 2005-05-31 2006-05-31 Microelectromechanical systems (MEMS) device including a superlattice and associated methods
EP06760587A EP1896361A2 (en) 2005-05-31 2006-05-31 Microelectromechanical systems (mems) device including a superlattice and associated methods
CA002609614A CA2609614A1 (en) 2005-05-31 2006-05-31 Microelectromechanical systems (mems) device including a superlattice and associated methods
AU2006252590A AU2006252590A1 (en) 2005-05-31 2006-05-31 Microelectromechanical systems (MEMS) device including a superlattice and associated methods

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US68599605P 2005-05-31 2005-05-31
US60/685,996 2005-05-31

Publications (2)

Publication Number Publication Date
WO2006130665A2 WO2006130665A2 (en) 2006-12-07
WO2006130665A3 true WO2006130665A3 (en) 2007-01-18

Family

ID=37103354

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/021082 WO2006130665A2 (en) 2005-05-31 2006-05-31 Microelectromechanical systems (mems) device including a superlattice and associated methods

Country Status (7)

Country Link
EP (1) EP1896361A2 (en)
JP (1) JP2008545542A (en)
CN (1) CN101258100B (en)
AU (1) AU2006252590A1 (en)
CA (1) CA2609614A1 (en)
TW (2) TWI306646B (en)
WO (1) WO2006130665A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8604898B2 (en) * 2009-04-20 2013-12-10 International Business Machines Corporation Vertical integrated circuit switches, design structure and methods of fabricating same
CN102442631A (en) * 2010-10-08 2012-05-09 探微科技股份有限公司 Micro-electromechanical device and composite base material used in one micro-electromechanical device
CN105428520A (en) * 2015-11-09 2016-03-23 业成光电（深圳）有限公司 Method for manufacturing piezoelectric element and piezoelectric substrate

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5393375A (en) * 1992-02-03 1995-02-28 Cornell Research Foundation, Inc. Process for fabricating submicron single crystal electromechanical structures
EP1150318A1 (en) * 1998-12-22 2001-10-31 NEC Corporation Micromachine switch and its production method
WO2005034245A1 (en) * 2003-06-26 2005-04-14 Rj Mears, Llc Semiconductor device including band-engineered superlattice

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4590399A (en) * 1984-02-28 1986-05-20 Exxon Research And Engineering Co. Superlattice piezoelectric devices
GB2362506A (en) * 2000-05-19 2001-11-21 Secr Defence Field effect transistor with an InSb quantum well and minority carrier extraction
JP2004535062A (en) * 2001-06-14 2004-11-18 ナノダイナミックス インコーポレイテッド Epitaxial SiOx barrier / insulating layer
JP2003217421A (en) * 2002-01-24 2003-07-31 Matsushita Electric Ind Co Ltd Micromachine switch

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5393375A (en) * 1992-02-03 1995-02-28 Cornell Research Foundation, Inc. Process for fabricating submicron single crystal electromechanical structures
EP1150318A1 (en) * 1998-12-22 2001-10-31 NEC Corporation Micromachine switch and its production method
WO2005034245A1 (en) * 2003-06-26 2005-04-14 Rj Mears, Llc Semiconductor device including band-engineered superlattice

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
TSU R: "Phenomena in silicon nanostructure devices", APPLIED PHYSICS A: MATERIALS SCIENCE AND PROCESSING, SPRINGER VERLAG, BERLIN, DE, vol. 71, no. 4, 6 September 2000 (2000-09-06), pages 391 - 402, XP002314003, ISSN: 0947-8396 *

Also Published As

Publication number Publication date
AU2006252590A8 (en) 2008-04-03
AU2006252590A1 (en) 2006-12-07
TWI306666B (en) 2009-02-21
TW200707650A (en) 2007-02-16
CN101258100B (en) 2012-01-04
CN101258100A (en) 2008-09-03
TW200711124A (en) 2007-03-16
JP2008545542A (en) 2008-12-18
EP1896361A2 (en) 2008-03-12
TWI306646B (en) 2009-02-21
WO2006130665A2 (en) 2006-12-07
CA2609614A1 (en) 2006-12-07

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