WO2008033982A3 - Field effect transistor with raised source/drain fin straps - Google Patents

Field effect transistor with raised source/drain fin straps Download PDF

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Publication number
WO2008033982A3
WO2008033982A3 PCT/US2007/078366 US2007078366W WO2008033982A3 WO 2008033982 A3 WO2008033982 A3 WO 2008033982A3 US 2007078366 W US2007078366 W US 2007078366W WO 2008033982 A3 WO2008033982 A3 WO 2008033982A3
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WO
WIPO (PCT)
Prior art keywords
source
straps
field effect
effect transistor
gate
Prior art date
Application number
PCT/US2007/078366
Other languages
French (fr)
Other versions
WO2008033982A2 (en
Inventor
Brent A Anderson
Thomas Ludwig
Edward J Nowak
Original Assignee
Ibm
Brent A Anderson
Thomas Ludwig
Edward J Nowak
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm, Brent A Anderson, Thomas Ludwig, Edward J Nowak filed Critical Ibm
Priority to KR1020097007562A priority Critical patent/KR101104040B1/en
Priority to JP2009528465A priority patent/JP5325106B2/en
Priority to EP07842398A priority patent/EP2070110A4/en
Publication of WO2008033982A2 publication Critical patent/WO2008033982A2/en
Publication of WO2008033982A3 publication Critical patent/WO2008033982A3/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/785—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
    • H01L29/41725—Source or drain electrodes for field effect devices
    • H01L29/41791—Source or drain electrodes for field effect devices for transistors with a horizontal current flow in a vertical sidewall, e.g. FinFET, MuGFET
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
    • H01L29/66568—Lateral single gate silicon transistors
    • H01L29/66613—Lateral single gate silicon transistors with a gate recessing step, e.g. using local oxidation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
    • H01L29/66787—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel
    • H01L29/66795—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/785—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
    • H01L2029/7858—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET having contacts specially adapted to the FinFET geometry, e.g. wrap-around contacts

Abstract

Therefore, disclosed above are embodiments of a multi-fin field effect transistor structure (300 or 400) (e.g., a multi-fin dual-gate FET or tri-gate FET) that provides low resistance strapping of the source/drain regions (41, 42) of the fins (60a-c), while also maintaining low capacitance to the gate (80) by raising the level of the straps (71, 72) above the level of the gate (80). Embodiments of the structure of the invention incorporate either conductive vias (31, 32) (see structure 300) or taller source/drain regions (see structure 400) in order to electrically connect the source/drain straps (71, 72) to the source/drain regions (41, 42) of each fin (60a-c). Also, disclosed are embodiments of associated methods of forming these structures.
PCT/US2007/078366 2006-09-15 2007-09-13 Field effect transistor with raised source/drain fin straps WO2008033982A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020097007562A KR101104040B1 (en) 2006-09-15 2007-09-13 Field effect transistor with raised source/drain fin straps
JP2009528465A JP5325106B2 (en) 2006-09-15 2007-09-13 Field effect transistor with high source / drain fin strap
EP07842398A EP2070110A4 (en) 2006-09-15 2007-09-13 Field effect transistor with raised source/drain fin straps

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/532,207 2006-09-15
US11/532,207 US7456471B2 (en) 2006-09-15 2006-09-15 Field effect transistor with raised source/drain fin straps

Publications (2)

Publication Number Publication Date
WO2008033982A2 WO2008033982A2 (en) 2008-03-20
WO2008033982A3 true WO2008033982A3 (en) 2008-06-05

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/078366 WO2008033982A2 (en) 2006-09-15 2007-09-13 Field effect transistor with raised source/drain fin straps

Country Status (5)

Country Link
US (2) US7456471B2 (en)
EP (1) EP2070110A4 (en)
JP (1) JP5325106B2 (en)
KR (1) KR101104040B1 (en)
WO (1) WO2008033982A2 (en)

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Also Published As

Publication number Publication date
WO2008033982A2 (en) 2008-03-20
US20080286913A1 (en) 2008-11-20
KR20090075822A (en) 2009-07-09
JP5325106B2 (en) 2013-10-23
US7456471B2 (en) 2008-11-25
JP2010503997A (en) 2010-02-04
US7851283B2 (en) 2010-12-14
EP2070110A2 (en) 2009-06-17
KR101104040B1 (en) 2012-01-06
EP2070110A4 (en) 2012-01-25
US20080067613A1 (en) 2008-03-20

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