WO2008151266A3 - Interferometry for determining characteristics of an object surface, with spatially coherent illumination - Google Patents

Interferometry for determining characteristics of an object surface, with spatially coherent illumination Download PDF

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Publication number
WO2008151266A3
WO2008151266A3 PCT/US2008/065863 US2008065863W WO2008151266A3 WO 2008151266 A3 WO2008151266 A3 WO 2008151266A3 US 2008065863 W US2008065863 W US 2008065863W WO 2008151266 A3 WO2008151266 A3 WO 2008151266A3
Authority
WO
WIPO (PCT)
Prior art keywords
test
light
spatially coherent
interferometry
object surface
Prior art date
Application number
PCT/US2008/065863
Other languages
French (fr)
Other versions
WO2008151266A2 (en
Inventor
Xavier Colonna De Lega
Peter De Groot
Original Assignee
Zygo Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/758,252 external-priority patent/US7884947B2/en
Application filed by Zygo Corporation filed Critical Zygo Corporation
Publication of WO2008151266A2 publication Critical patent/WO2008151266A2/en
Publication of WO2008151266A3 publication Critical patent/WO2008151266A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02043—Imaging of the Fourier or pupil or back focal plane, i.e. angle resolved imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G01B9/02072—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by calibration or testing of interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G01B9/02084—Processing in the Fourier or frequency domain when not imaged in the frequency domain
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G01B9/02088—Matching signals with a database
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Abstract

Disclosed is an apparatus which includes: an interferometer configured to direct broadband spatially coherent test light to a test surface of a test object over a range of illumination angles and subsequently combine it with reference light to form an interference pattern, the test and reference light being derived from a common source; a multi-element detector; and one or more optics configured to direct at least a portion of the combined light to the detector so that different elements of the detector correspond to different illumination angles of a region of the test surface illuminated by the test light.
PCT/US2008/065863 2007-06-05 2008-06-05 Interferometry for determining characteristics of an object surface, with spatially coherent illumination WO2008151266A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US94200107P 2007-06-05 2007-06-05
US11/758,252 2007-06-05
US11/758,252 US7884947B2 (en) 2005-01-20 2007-06-05 Interferometry for determining characteristics of an object surface, with spatially coherent illumination
US60/942,001 2007-06-05

Publications (2)

Publication Number Publication Date
WO2008151266A2 WO2008151266A2 (en) 2008-12-11
WO2008151266A3 true WO2008151266A3 (en) 2010-01-14

Family

ID=40094417

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2008/065863 WO2008151266A2 (en) 2007-06-05 2008-06-05 Interferometry for determining characteristics of an object surface, with spatially coherent illumination

Country Status (1)

Country Link
WO (1) WO2008151266A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8649024B2 (en) 2010-12-03 2014-02-11 Zygo Corporation Non-contact surface characterization using modulated illumination
WO2013105922A2 (en) * 2011-12-12 2013-07-18 Zygo Corporation Non-contact surface characterization using modulated illumination
US8896827B2 (en) 2012-06-26 2014-11-25 Kla-Tencor Corporation Diode laser based broad band light sources for wafer inspection tools
CN109828365B (en) * 2019-02-25 2021-05-04 南京理工大学 Mirau type super-resolution interference microscope objective

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020148955A1 (en) * 2000-07-27 2002-10-17 Hill Henry A. Multiple-source arrays with optical transmission enhanced by resonant cavities
US20040085544A1 (en) * 2002-09-09 2004-05-06 De Groot Peter J. Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
US20050068540A1 (en) * 2003-09-15 2005-03-31 De Groot Peter J. Triangulation methods and systems for profiling surfaces through a thin film coating
US20050073692A1 (en) * 2003-03-06 2005-04-07 De Groot Peter J. Profiling complex surface structures using scanning interferometry
US20060072104A1 (en) * 2003-06-12 2006-04-06 Thomas Engel Method for determining the image quality of an optical imaging system
US20070091940A1 (en) * 2005-10-11 2007-04-26 Jameson Ralph S Apparatus and method for generating short optical pulses

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020148955A1 (en) * 2000-07-27 2002-10-17 Hill Henry A. Multiple-source arrays with optical transmission enhanced by resonant cavities
US20040085544A1 (en) * 2002-09-09 2004-05-06 De Groot Peter J. Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
US20050073692A1 (en) * 2003-03-06 2005-04-07 De Groot Peter J. Profiling complex surface structures using scanning interferometry
US20060072104A1 (en) * 2003-06-12 2006-04-06 Thomas Engel Method for determining the image quality of an optical imaging system
US20050068540A1 (en) * 2003-09-15 2005-03-31 De Groot Peter J. Triangulation methods and systems for profiling surfaces through a thin film coating
WO2005029192A2 (en) * 2003-09-15 2005-03-31 Zygo Corporation Surface triangulation and profiling through a thin film coating
US20070091940A1 (en) * 2005-10-11 2007-04-26 Jameson Ralph S Apparatus and method for generating short optical pulses

Also Published As

Publication number Publication date
WO2008151266A2 (en) 2008-12-11

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