WO2009004609A3 - Magnetic field sensor device for direct magnetic field imaging and method of fabrication thereof - Google Patents

Magnetic field sensor device for direct magnetic field imaging and method of fabrication thereof Download PDF

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Publication number
WO2009004609A3
WO2009004609A3 PCT/IL2008/000876 IL2008000876W WO2009004609A3 WO 2009004609 A3 WO2009004609 A3 WO 2009004609A3 IL 2008000876 W IL2008000876 W IL 2008000876W WO 2009004609 A3 WO2009004609 A3 WO 2009004609A3
Authority
WO
WIPO (PCT)
Prior art keywords
magnetic field
sensor device
fabrication
field imaging
direct
Prior art date
Application number
PCT/IL2008/000876
Other languages
French (fr)
Other versions
WO2009004609A2 (en
Inventor
Amit Finkler
Jens Martin
Yuri Myasoedov
Yehonathan Segev
Amir Yacoby
Eli Zeldov
Original Assignee
Yeda Res & Dev
Amit Finkler
Jens Martin
Yuri Myasoedov
Yehonathan Segev
Amir Yacoby
Eli Zeldov
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yeda Res & Dev, Amit Finkler, Jens Martin, Yuri Myasoedov, Yehonathan Segev, Amir Yacoby, Eli Zeldov filed Critical Yeda Res & Dev
Priority to US12/667,642 priority Critical patent/US8723514B2/en
Priority to EP08763633.8A priority patent/EP2165211B1/en
Publication of WO2009004609A2 publication Critical patent/WO2009004609A2/en
Publication of WO2009004609A3 publication Critical patent/WO2009004609A3/en
Priority to IL202652A priority patent/IL202652A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/035—Measuring direction or magnitude of magnetic fields or magnetic flux using superconductive devices
    • G01R33/0354—SQUIDS
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/50—MFM [Magnetic Force Microscopy] or apparatus therefor, e.g. MFM probes
    • G01Q60/54—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G01Q60/56—Probes with magnetic coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/038—Measuring direction or magnitude of magnetic fields or magnetic flux using permanent magnets, e.g. balances, torsion devices
    • G01R33/0385—Measuring direction or magnitude of magnetic fields or magnetic flux using permanent magnets, e.g. balances, torsion devices in relation with magnetic force measurements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49227—Insulator making

Abstract

The present invention discloses a novel magnetic sensor device performing direct magnetic field imaging, comprising a probe having a conical tip portion which is configured as a sensor having two superconductors separated by a thin non-superconducting layer (such as a Josephson junction based sensor), where the non-superconducting layer is located at the apex portion of said conical tip, thereby defining electron tunneling region(s) at said apex portion. The technique of the present invention enables the sensor device to be very small and to be brought very close to the sample surface.
PCT/IL2008/000876 2007-07-05 2008-06-26 Magnetic field sensor device for direct magnetic field imaging and method of fabrication thereof WO2009004609A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US12/667,642 US8723514B2 (en) 2007-07-05 2008-06-26 Magnetic field sensor device for direct magnetic field imaging and method of fabrication thereof
EP08763633.8A EP2165211B1 (en) 2007-07-05 2008-06-26 Magnetic field sensor device for direct magnetic field imaging and method of fabrication thereof
IL202652A IL202652A (en) 2007-07-05 2009-12-10 Magnetic field sensor device for direct magnetic field imaging and method of fabrication thereof

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US94802507P 2007-07-05 2007-07-05
US60/948,025 2007-07-05

Publications (2)

Publication Number Publication Date
WO2009004609A2 WO2009004609A2 (en) 2009-01-08
WO2009004609A3 true WO2009004609A3 (en) 2009-02-12

Family

ID=40091951

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IL2008/000876 WO2009004609A2 (en) 2007-07-05 2008-06-26 Magnetic field sensor device for direct magnetic field imaging and method of fabrication thereof

Country Status (4)

Country Link
US (1) US8723514B2 (en)
EP (1) EP2165211B1 (en)
TR (1) TR201807334T4 (en)
WO (1) WO2009004609A2 (en)

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US7615385B2 (en) 2006-09-20 2009-11-10 Hypres, Inc Double-masking technique for increasing fabrication yield in superconducting electronics
US8593141B1 (en) 2009-11-24 2013-11-26 Hypres, Inc. Magnetic resonance system and method employing a digital squid
US8970217B1 (en) 2010-04-14 2015-03-03 Hypres, Inc. System and method for noise reduction in magnetic resonance imaging
JP5771137B2 (en) * 2011-12-21 2015-08-26 公益財団法人国際超電導産業技術研究センター High temperature superconducting magnetic sensor
CN109765257A (en) 2012-08-22 2019-05-17 哈佛学院院长及董事 Nanoscale scanning sensor
EP2999972A4 (en) * 2013-05-23 2017-03-01 Yeda Research and Development Co., Ltd. Sensor device for direct magnetic field imaging
EP3268749B1 (en) * 2015-03-11 2021-09-08 Yeda Research and Development Co., Ltd. Superconducting scanning sensor for nanometer scale temperature imaging
US10393827B2 (en) 2016-06-03 2019-08-27 Texas Tech University System Magnetic field vector imaging array
CN107689379B (en) * 2016-08-05 2021-04-23 中国科学院苏州纳米技术与纳米仿生研究所 Scanning probe and preparation method thereof
US10367134B2 (en) 2017-06-07 2019-07-30 International Business Machines Corporation Shadow mask sidewall tunnel junction for quantum computing
US11139424B2 (en) * 2018-10-22 2021-10-05 International Business Machines Corporation High-saturation power Josephson ring modulators
US11038097B2 (en) 2019-09-19 2021-06-15 International Business Machines Corporation Magnetic structures with tapered edges
US11094873B2 (en) 2019-11-14 2021-08-17 International Business Machines Corporation Transmon qubits with self defined junctions
CN112467022B (en) * 2020-11-23 2023-04-07 南京大学 Niobium-based probe SQUID electromagnetic sensor and preparation method and application thereof

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EP0699921A2 (en) * 1994-08-30 1996-03-06 International Business Machines Corporation Improved probes for scanning squid magnetometers
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EP0869372A2 (en) * 1997-03-31 1998-10-07 Seiko Instruments Inc. Superconducting quantum interference device and non-destructive evaluation apparatus using the same
US6211673B1 (en) * 1997-06-03 2001-04-03 International Business Machines Corporation Apparatus for use in magnetic-field detection and generation devices
EP1202052A2 (en) * 2000-10-26 2002-05-02 Forschungszentrum Jülich Gmbh SQUID microscope
WO2004021017A2 (en) * 2002-08-28 2004-03-11 Vanderbilt University Method and apparatus for high resolution imaging of samples using superconducting quantum inerference apparatus and methods
US20050057248A1 (en) * 2003-09-15 2005-03-17 Woods Solomon I. Method and system for high resolution current imaging by direct magnetic field sensing
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Also Published As

Publication number Publication date
EP2165211B1 (en) 2018-02-28
EP2165211A2 (en) 2010-03-24
US20100207622A1 (en) 2010-08-19
US8723514B2 (en) 2014-05-13
WO2009004609A2 (en) 2009-01-08
TR201807334T4 (en) 2018-06-21

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