WO2009010983A3 - Method and system for measuring a height of a protuberance on a surface of an electric circuit - Google Patents
Method and system for measuring a height of a protuberance on a surface of an electric circuit Download PDFInfo
- Publication number
- WO2009010983A3 WO2009010983A3 PCT/IL2008/001003 IL2008001003W WO2009010983A3 WO 2009010983 A3 WO2009010983 A3 WO 2009010983A3 IL 2008001003 W IL2008001003 W IL 2008001003W WO 2009010983 A3 WO2009010983 A3 WO 2009010983A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- protuberance
- height
- measuring
- electric circuit
- select
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
Abstract
A system for measuring a height of a protuberance on a surface of an electric circuit, the system includes optics and a processor that are adapted to generate height estimations by applying a triangulation process and select a selected protuberance in response to a selection rule.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US95063407P | 2007-07-19 | 2007-07-19 | |
US60/950,634 | 2007-07-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2009010983A2 WO2009010983A2 (en) | 2009-01-22 |
WO2009010983A3 true WO2009010983A3 (en) | 2010-03-04 |
Family
ID=40260187
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/IL2008/001003 WO2009010983A2 (en) | 2007-07-19 | 2008-07-20 | Method and system for measuring a height of a protuberance on a surface of an electric circuit |
Country Status (1)
Country | Link |
---|---|
WO (1) | WO2009010983A2 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9885671B2 (en) | 2014-06-09 | 2018-02-06 | Kla-Tencor Corporation | Miniaturized imaging apparatus for wafer edge |
US9645097B2 (en) | 2014-06-20 | 2017-05-09 | Kla-Tencor Corporation | In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2619004A (en) * | 1950-08-18 | 1952-11-25 | Research Corp | Inspection device for determining height of dots on engraved plates |
US5878152A (en) * | 1997-05-21 | 1999-03-02 | Cognex Corporation | Depth from focal gradient analysis using object texture removal by albedo normalization |
US6249347B1 (en) * | 1998-03-05 | 2001-06-19 | General Scanning, Inc. | Method and system for high speed measuring of microscopic targets |
US6377865B1 (en) * | 1998-02-11 | 2002-04-23 | Raindrop Geomagic, Inc. | Methods of generating three-dimensional digital models of objects by wrapping point cloud data points |
US6611344B1 (en) * | 1998-11-30 | 2003-08-26 | Rahmonic Resources Pte Ltd | Apparatus and method to measure three dimensional data |
US20040099710A1 (en) * | 2000-09-29 | 2004-05-27 | Bernd Sommer | Optical ball height measurement of ball grid arrays |
-
2008
- 2008-07-20 WO PCT/IL2008/001003 patent/WO2009010983A2/en active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2619004A (en) * | 1950-08-18 | 1952-11-25 | Research Corp | Inspection device for determining height of dots on engraved plates |
US5878152A (en) * | 1997-05-21 | 1999-03-02 | Cognex Corporation | Depth from focal gradient analysis using object texture removal by albedo normalization |
US6377865B1 (en) * | 1998-02-11 | 2002-04-23 | Raindrop Geomagic, Inc. | Methods of generating three-dimensional digital models of objects by wrapping point cloud data points |
US6249347B1 (en) * | 1998-03-05 | 2001-06-19 | General Scanning, Inc. | Method and system for high speed measuring of microscopic targets |
US6611344B1 (en) * | 1998-11-30 | 2003-08-26 | Rahmonic Resources Pte Ltd | Apparatus and method to measure three dimensional data |
US20040099710A1 (en) * | 2000-09-29 | 2004-05-27 | Bernd Sommer | Optical ball height measurement of ball grid arrays |
Also Published As
Publication number | Publication date |
---|---|
WO2009010983A2 (en) | 2009-01-22 |
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