A method for fabricating a multi-level micro-fluidic device for an micro-fluidic injection head equipped with symmetrical heaters. The method incorporates two thick photoresist deposition processes, a light-absorbing layer deposited in-between and a nickel-containing material electroplating process....http://www.google.de/patents/US6951622?utm_source=gb-gplus-sharePatent US6951622 - Method for fabricating an integrated nozzle plate and multi-level micro-fluidic devices fabricated
