A method and apparatus for terminating a probe that probes a semiconductor device with a signal cable from a tester is provided to connect layers of the probe to layers of the signal cable side by side. The probe and signal cable can be a co-axial or tri-axial probe and signal cable, respectively. A...http://www.google.de/patents/US20040174175?utm_source=gb-gplus-sharePatent US20040174175 - Apparatus and method for terminating probe apparatus of semiconductor wafer
