In accordance with a first aspect of the invention, a plasma reactor having a chamber for containing a plasma and a passageway communicating with the chamber is enhanced with a first removable plasma confinement magnet module placed adjacent the passageway including a first module housing and a first...http://www.google.de/patents/US6454898?utm_source=gb-gplus-sharePatent US6454898 - Inductively coupled RF Plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners
