A semiconductor cassetteand transfer system for facilitating the direct loading and unloading of wafers from different sides of a cassette by a first robot handling means moveable along a first extension axis and second robot handling means moveable along a second extension axis intersecting said first...http://www.google.de/patents/US5387067?utm_source=gb-gplus-sharePatent US5387067 - Direct load/unload semiconductor wafer cassette apparatus and transfer system
