An integrated laser scanning device including: a substrate of semiconductor and/or electro-optical material, a laser light source disposed on the substrate; and a scanner disposed on the substrate in the path of the laser beam for repetitively and cyclically moving the laser beam so as to form a scanning...http://www.google.de/patents/US5625483?utm_source=gb-gplus-sharePatent US5625483 - Integrated light source and scanning element implemented on a semiconductor or electro-optical substrate
