Disclosed is a method for characterizing a sample having a structure disposed on or within the sample, comprising the steps of applying a first pulse of light to a surface of the sample for creating a propagating strain pulse in the sample, applying a second pulse of light to the surface so that the...http://www.google.de/patents/US7505154?utm_source=gb-gplus-sharePatent US7505154 - Optical method for the characterization of laterally patterned samples in integrated circuits
