Embodiments of MEMS devices comprise a conductive movable layer spaced apart from a conductive fixed layer by a gap, and supported by rigid support structures, or rivets, overlying depressions in the conductive movable layer, or by posts underlying depressions in the conductive movable layer. In certain...http://www.google.de/patents/US7566940?utm_source=gb-gplus-sharePatent US7566940 - Electromechanical devices having overlying support structures
