A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector....http://www.google.de/patents/US6836366?utm_source=gb-gplus-sharePatent US6836366 - Integrated tunable fabry-perot filter and method of making same
