A thermal microactuator is provided that can be deflected in multiple positions. The actuator has a hot arm and a cold arm coupled together at their distal ends suspended above a reference plane of a substrate. A potential difference is applied across the hot arm so that a current circulates through...http://www.google.de/patents/US6739132?utm_source=gb-gplus-sharePatent US6739132 - Thermal micro-actuator based on selective electrical excitation
