An aerosolization system comprises a gas flow passage, and an aerosol generator comprising a plate having a plurality of apertures and a vibratable element disposed to vibrate the plate. The aerosol generator is adapted to aerosolize a liquid for delivery into the gas flow passage. A flow sensor is configured...http://www.google.de/patents/US20020104530?utm_source=gb-gplus-sharePatent US20020104530 - Piezoelectric polymer flow sensor and methods
