A semiconductor device and a method of fabricating the semiconductor device having a composite dielectric layer including steps of providing a semiconductor substrate; depositing on the semiconductor substrate alternating sub-layers of a first dielectric material and a second dielectric material to form...http://www.google.de/patents/US6645882?utm_source=gb-gplus-sharePatent US6645882 - Preparation of composite high-K/standard-K dielectrics for semiconductor devices
