An acceleration sensor includes: a semiconductor substrate including a support layer and a semiconductor layer, which are stacked in a first direction; a movable electrode and a fixed electrode; and a trench. The movable electrode separately faces the fixed electrode by sandwiching the trench along with...http://www.google.de/patents/US7418864?utm_source=gb-gplus-sharePatent US7418864 - Acceleration sensor and method for manufacturing the same
