A system and method for an electronically scanned antenna is provided in which phase shifters are deposited en masse along with other electronically scanned antenna components on a wafer scale substrate using a thin film process. Alternative wafer scale sizes may be utilized to furnish a required antenna...http://www.google.de/patents/US7324043?utm_source=gb-gplus-sharePatent US7324043 - Phase shifters deposited en masse for an electronically scanned antenna
