The present method and system features an active compliant pin chuck to hold a substrate, having opposed first and second surfaces, and compensates for non-planarity in one of the surfaces of the substrate. To that end, the support system includes a chuck having a plurality of piezo pins and reference...http://www.google.de/patents/US7307697?utm_source=gb-gplus-sharePatent US7307697 - Adaptive shape substrate support system
