A detector optics system for an electron probe system is disclosed. Aspects of the detector optics system include: the ability to simultaneously detect two electron populations, secondary electrons (SEs) and backscattered electrons (BSEs), wherein both populations are emitted from a substrate due to...http://www.google.de/patents/US7227142?utm_source=gb-gplus-sharePatent US7227142 - Dual detector optics for simultaneous collection of secondary and backscattered electrons
