It is an object to provide a laser apparatus, a laser irradiating method and a manufacturing method of a semiconductor device that make laser energy more stable. To attain the object, a part of laser beam emitted from an oscillator is sampled to generate an electric signal that contains as data energy...http://www.google.de/patents/US7920611?utm_source=gb-gplus-sharePatent US7920611 - Laser apparatus, laser irradiation method, and manufacturing method of semiconductor device
