A semiconductor device includes an oxide semiconductor thin film layer primarily including zinc oxide having at least one orientation other than (002) orientation. The zinc oxide may have a mixed orientation including (002) orientation and (101) orientation. Alternatively, the zinc oxide may have a mixed...http://www.google.de/patents/US20070187678?utm_source=gb-gplus-sharePatent US20070187678 - Semiconductor device including active layer made of zinc oxide with controlled orientations and manufacturing method thereof
