A method and apparatus for inspecting pattern defects emitting a laser beam, adjusting a light-amount of the laser beam, converting the light-amount adjusted laser beam into a slit-like laser light flux, lowering coherency of the slit-like laser light flux, and irradiating a sample with the coherence...http://www.google.de/patents/US7110105?utm_source=gb-gplus-sharePatent US7110105 - Method and apparatus for inspecting pattern defects
