This invention relates to an apparatus and method for integrated measurement of a sample that has miniature features. The apparatus has an optical measuring unit for illuminating the sample with a global test radiation over an optical test region and obtaining an optical response, such as scattered or...http://www.google.de/patents/US7397030?utm_source=gb-gplus-sharePatent US7397030 - Integrated local and global optical metrology for samples having miniature features
