A weight of an inertial sensor if formed from a plurality of divided weights, and the divided weights are connected to each other by elastically deformable beams. A movable range and a mass of each of the divided weights and a rigidity of each of the beams are adjusted and a plurality of deformation...http://www.google.de/patents/US7658109?utm_source=gb-gplus-sharePatent US7658109 - Inertial sensor and manufacturing method of the same
