Glass substrates suitable for thin film processing can be batch heated to processing temperatures and batch cooled after processing by radiant heating and cooling in a vacuum chamber. The heating and/or cooling chamber is fitted with a cassette including heat conductive shelves that can be heated or...http://www.google.de/patents/US5607009?utm_source=gb-gplus-sharePatent US5607009 - Method of heating and cooling large area substrates and apparatus therefor
