A method for fabricating an ultra-small electrode or plug contact for use in chalcogenide memory cells specifically, and in semiconductor devices generally, in which disposable spacers are utilized to fabricate ultra-small pores into which the electrodes are formed. The electrodes thus defined have minimum...http://www.google.de/patents/US7273809?utm_source=gb-gplus-sharePatent US7273809 - Method of fabricating a conductive path in a semiconductor device
