Provided are a distributed analog phase shifter and a method of manufacturing the same, which reduce a change in a characteristic impedance while changing a phase velocity with respect to an applied voltage. In the distributed analog phase shifter, a coplanar waveguide (CPW) is formed in a line form...http://www.google.de/patents/US7192530?utm_source=gb-gplus-sharePatent US7192530 - Method of manufacturing distributed analog phase shifter using etched ferroelectric thin film
