A micromachined actuator including a body or platform mounted to a suspension system anchored to a substrate. In one embodiment, the suspension system is comprised of a set of one or more spring flexures connecting the actuator body to the substrate with strain relief provided via connecting torsional...http://www.google.de/patents/US7741685?utm_source=gb-gplus-sharePatent US7741685 - Method and apparatus for an actuator system having buried interconnect lines
