A wafer holder is provided for semiconductor wafer processing that is particularly useful where wafers are held and moved in other than upwardly facing orientations during handling and processing. The holder includes an annular wafer mounting ring that is resiliently mounted to and biased against an...http://www.google.de/patents/US6143147?utm_source=gb-gplus-sharePatent US6143147 - Wafer holding assembly and wafer processing apparatus having said assembly
