A semiconductor processing method of making electrical contact to a node includes, a) forming an insulating layer relative to a substrate having a node location to which electrical connection is to be made; b) forming a contact opening in the insulating layer to the node location; c) forming a layer...http://www.google.de/patents/US5773363?utm_source=gb-gplus-sharePatent US5773363 - Semiconductor processing method of making electrical contact to a node
