A cleaving tool provides pressurized gas to the edge of a substrate to cleave the substrate at a selected interface. A substrate, such as a bonded substrate, is loaded into the cleaving tool, and two halves of the tool are brought together to apply a selected pressure to the substrate. A compliant pad...http://www.google.de/patents/US6554046?utm_source=gb-gplus-sharePatent US6554046 - Substrate cleaving tool and method
