Methods for fabricating a back-end-of-line (BEOL) wiring structure that includes an on-chip inductor and an on-chip capacitor, as well as methods for tuning and fabricating a resonator that includes the on-chip inductor and on-chip capacitor. The fabrication methods generally include forming the on-chip...http://www.google.de/patents/US7811919?utm_source=gb-gplus-sharePatent US7811919 - Methods of fabricating a BEOL wiring structure containing an on-chip inductor and an on-chip capacitor
