A programmable semiconductor antifuse structure and method of fabricating are provided which allow for miniaturization of components to an area of less than one micron. The cell exhibits a high pre-programmed resistance of more than 1.times.10.sup.7 ohms and has an extremely low programmed cell resistance...http://www.google.de/patents/US5272666?utm_source=gb-gplus-sharePatent US5272666 - Programmable semiconductor antifuse structure and method of fabricating
