A thin film resistor with an insulating layer disposed between a substrate material and a resistor material is disclosed. Also, disclosed is a technique for fabricating this thin film resistor. In accordance with the preferred embodiment, the thin film resistor employs an insulating layer of silicon...http://www.google.de/patents/US5323138?utm_source=gb-gplus-sharePatent US5323138 - Reliable thin film resistors for integrated circuit applications
