Methods of cleaning one or more workpieces are described. A method includes oscillating workpieces while performing a cleaning operation (e.g., sonication, rinse, etc.) and dwelling the workpieces at one or more oscillation positions (e.g., an upper oscillation position, an lower oscillation position,...http://www.google.de/patents/US8163093?utm_source=gb-gplus-sharePatent US8163093 - Cleaning operations with dwell time
