An actuator includes a stage having a first direction and a second direction perpendicular to the first direction and seesawing around a third direction perpendicular to the first direction and the second direction with respect to a rotation center axis placed along the first direction. A first support...http://www.google.de/patents/US6995495?utm_source=gb-gplus-sharePatent US6995495 - 2-D actuator and manufacturing method thereof
