To provide a laser apparatus and a laser annealing method with which a crystalline semiconductor film with a larger crystal grain size is obtained and which are low in their running cost. A solid state laser easy to maintenance and high in durability is used as a laser, and laser light emitted therefrom...http://www.google.de/patents/US7179698?utm_source=gb-gplus-sharePatent US7179698 - Laser apparatus, laser annealing method, and manufacturing method of a semiconductor device
