Methods of fabricating an array capacitor are disclosed, in which via structures of the array capacitor have increased uniformity in their transverse areas. One method involves perforating a capacitor body to form first holes extending from a first surface and partially through the capacitor body. The...http://www.google.de/patents/US8161609?utm_source=gb-gplus-sharePatent US8161609 - Methods of fabricating an array capacitor
