A class of opto-electronic mechanical devices that include a planar optical waveguide having a cladding in which there is carried an evanescent electric field by a light beam traveling along the waveguide and a mechanical micro-element controllably coupled into the evanescent field for varying locally...http://www.google.de/patents/US6212314?utm_source=gb-gplus-sharePatent US6212314 - Integrated opto-mechanical apparatus
