Methods for improving the mechanical properties of a CDO film are provided. The methods involve, for instance, providing either a dense CDO film or a porous CDO film in which the porogen has been removed followed by curing the CDO film at an elevated temperature using either a UV light treatment, an...http://www.google.de/patents/US7381662?utm_source=gb-gplus-sharePatent US7381662 - Methods for improving the cracking resistance of low-k dielectric materials
